317 Convection-Enhanced Pirani Vacuum Pressure Sensors

317 Convection-Enhanced Pirani Vacuum Sensors are general purpose vacuum gauges for foreline pressure measurement up to 1000 Torr. They can be used in many industrial applications such as semiconductor manufacturing, load locks, leak detection, vacuum coating, and freeze dryers. Bakable and radiation-resistant versions of the 317 Convection-Enhanced Pirani Vacuum Sensor are suitable for high-energy physics applications.

Ideal for foreline measurement and vacuum control
1.0 x 10^-3 to 1000 Torr measurement range
Bakeable and radiation-resistant versions available
Low cost, rugged design

See All Features

Show Filters:

Showing 9 of 9 total products

Description	Compatibility	Fitting Type	Bake Out Temperature	Price
103170010SHPirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, NW16 ISO-KF	UNIVERSAL	ISO-KF	100°C non-operating without cable and electronics	$342
103170011SHPirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 0.125 NPT Male	UNIVERSAL	0.125 in. NPT male	100°C non-operating without cable and electronics	$342
103170012SHPirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 8 VCR Female	UNIVERSAL	8 VCR female	100°C non-operating without cable and electronics	$404
103170013SHPirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 1.33 in. Mini-CF	UNIVERSAL	Mini-CF	100°C non-operating without cable and electronics	$404
103170014SHPirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 2.75 in. CF	UNIVERSAL	CF Flange	100°C non-operating without cable and electronics	$404
103170016SHPirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 15 mm Tube	UNIVERSAL	15 mm Tube	100°C non-operating without cable and electronics	$404
103170024SHPirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 2.75 in. CF	UNIVERSAL	CF Flange	250°C non-operating without cable and electronics	$1,182
103170027SHPirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, NW25 ISO-KF	UNIVERSAL	ISO-KF	100°C non-operating without cable and electronics	$355
103170029SHPirani Vacuum Sensor, Convection-Enhanced, 0.001 - 1000 Torr, 4 VCR Female	UNIVERSAL	4 VCR female	100°C non-operating without cable and electronics	$355

Specifications

Sensor Type
Convection-Enhanced Pirani
Measurement Range
1.0 x 10-3 to 1.0 x 10+3 Torr
1.3 x 10-3 to 1.3 x 10+3 mbar
1.3 x 10-1 to 1.3 x 10+5 Pascal
Set Point Range
2.0 x 10-3 to 9.5 x 10+2 Torr
2.7 x 10-3 to 1.2 x 10+3 mbar
2.7 x 10-1 to 1.2 x 10+5 Pascal
Resolution
1% of indicated decade
Reproducibility
5% of indicated pressure
Connector
9-pin Type "D"

Operating Temperature
0° to 50°C (32° to 122°F)
Bake Out Temperature
100° C non-operating without cable and electronics
Exposed Materials
304 stainless steel, nickel 200, glass, platinum
Internal Volume
8.0 cc
Weight
0.5 lb (0.2 kg), 1.34 lb (0.52 kg) with a 23/4 inch CF flange

Accessories

Compatible Cables

Description	Compatibility	Price
103170006SHVacuum Gauge Cable, 345 or 317 Sensors to 945, 947, 937B, 946 Controllers, 10 ft.	UNIVERSAL	$104
103170007SHVacuum Gauge Cable, 345 or 317 Sensors to 945, 947, 937B, 946 Controllers, 25 ft.	UNIVERSAL	$154
103170008SHVacuum Gauge Cable, 345 or 317 Sensors to 945, 947, 937B, 946 Controllers, 50 ft.	UNIVERSAL	$384