Configuration Options

The following options are available for GPCMA General Purpose Pressure Controllers with Mass Flow Meter
Ordering Code Example: GPCMA13T07103R83T110

Configuration Option Option Code

GPCMA Pressure Controller with MFM

 GPCMA
Pressure Range Full Scale
500 Torr 52T
1000 Torr 13T
2000 Torr 23T
60 psia 61P
100 psia 12P
1000 mBar 13M
2000 mBar 23M
5000 mBar 53M
100 kPa 12K
200 kPa 22K
600 kPa 62K
Gas
Helium (001) 01
Argon (004) 04
Hydrogen (007) 07
Nitrogen (013) 13
Full Scale Flow Rate
5 sccm 500
10 sccm 101
20 sccm 201
50 sccm 501
100 sccm 102
200 sccm 202
500 sccm 502
1000 sccm 103
2000 sccm 203
5000 sccm 503
10000 sccm 104
20000 sccm 204
30000 sccm 304
50000 sccm 504
Fittings
Swagelok 4 VCR R
¼ in. Swagelok S
C-Seal C
W-seal (1.125 in.) H
Communications
DeviceNet 6
EtherCAT 8
RS485 (ASCII) 5
Orifice Size
A (50 sccm) A
#1 (200 sccm) 1
#2 (1000 sccm) 2
#3 (5000 sccm) 3
#4 (10,000 sccm) 4
#5 (20,000 sccm) 5
#6 (30,000 sccm) 6
#7 (50,000 sccm) 7
Plug Material
Teflon T
Valve Type
Normally Closed 1
Firmware
Customer must specify firmware version at time of order 10

Description
GPCMA Downstream Pressure Controller with Mass Flow Meter

GPCMA

Absolute Pressure Controller, General Purpose, Mass Flow Controller, Metal-sealed

Specifications

  • Type
    GPCMA Absolute Pressure Controller with Mass Flow Meter
  • Pressure Range
    500 Torr, 1000 Torr, 2000 Torr, 100 psia Full Scale
  • Fitting Type
    Swagelok® 4 VCR Male
    1-1/8 inch surface mount (C-seal, W-seal)
    1/4 inch Swagelok compression seal
  • Valve Position
    Normally Closed
  • Valve Seat
    PTFE (Teflon®)
  • Flow Rate
    5, 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000, 30000, 50000 (N2 equivalent)
  • Pressure Readout Units
    Torr, kPa, psi, mbar
  • Pressure Resolution
    0.1 Torr
  • Pressure Control Accuracy
    ±1.0% of Reading >20% Full Scale
    ±0.2% of Full Scale <20% of Full Scale Flow (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
  • Transducer Over Pressure Limit
    2x Full Scale for all ranges
  • Maximum Differential Pressure
    45 psid
  • Burst Pressure
    1500 psig
  • Control Mode
    Downstream
  • Pressure Measurement Accuracy
    ±0.5% of Reading
  • Zero Temperature Coefficient
    ±0.02% of Full Scale/°C
  • Span Temperature Coefficient
    ±0.04% of Reading/°C
  • Control Range
    >2 to 100% of Full Scale
  • Typical Response Time
    <1.0 second
  • Operating Temperature
    10-50°C (50-to 122°F)
  • Storage Temperature
    -20-80°C (-4-176°F)
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • External Leak Integrity
    <1 x 10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <1.0% of orifice Full Scale (Nitrogen at 25 psig on inlet to atmosphere)
  • Flow Measurement Range
    2% to 100% of Full Scale
  • Flow Repeatability
    ±0.3% of Reading
  • Flow Resolution
    0.1% of Full Scale
  • Flow Accuracy
    ±1.0% of Reading >20% of Full Scale
    ±0.2% of Full Scale (>20% of Full Scale flow)
    (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
  • Flow Span Temperature Coefficient
    <0.08% of Reading/°C
  • Flow Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Wetted Materials
    Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, KM-45
    Optional: PTFE (Teflon) Valve Seat
  • Surface Finish
    <10 µinches, average Ra electropolished
  • Power Required
    DeviceNet™: +11 to +25 VDC per (<4 watts)
    EtherCAT®: +24 VDC (<5 watts)
    RS485: +15 to +24 VDC(<4 watts)
  • Connector-Interface
    DeviceNet™: 5 pin micro connector (power and comm.)
    EtherCAT®: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
    RS485: 9 pin Type D male (power and comm.)
  • Data Rate Switch
    DeviceNet™: 4 positions: 125, 250, 500K (Default), (programmable over network)
    EtherCAT®: No switch
    RS485: No switch (set data rate via RS485)
  • EtherCAT Communication Rate
    100 Mbps
  • DeviceNet Communication Rate
    125 Kbps, 250 Kbps, 500 Kbps
  • RS485CommunicationRate
    9.6 Kbps,19.2 Kbps,38.4 Kbps
  • MAC ID Switches
    DeviceNet™: 2 switches, 10 positions: 0,0 to 6,3, 1 to 254
    EtherCAT®: 3 switches, 16 positions
    RS485: Set address over RS485, Station Addresses 0,0 to 9,9
  • Network Size
    DeviceNet™: Up to 64 nodes
    EtherCAT®: Up to 4095 nodes
    RS485: Up to 32 nodes
  • Indicators
    DeviceNet™: LED Network (green/red), LED Module (green/red)
    EtherCAT®: LED Power (green), LED Run (green), LED Error (red), LED Comm (green)
    RS485: LED Comm (yellow),LED Error (red)
  • Weight
    <3 lbs (1.36 kg)
  • Compliance
    CE

Features

Digital I/O

The GPCMA digitally controlled pressure controller is available with digital I/O (EtherCAT®, DeviceNet™ or RS485). The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are less than 1 second dependent on installation conditions. Included is a digital calibration that yields 1% of set point accuracy.

High Purity Applications

The GPCMA, with 4 VCR® fittings, is 1.125'' (28.6 mm) wide and 4.88'' (124 mm overall) length allowing it to fit in standard gas systems. It is also available with the 1.125'' (38.6 mm) IGS compatible c-seal and w-seal configurations. The GPCMA metal-sealed, pressure controller with its 10 microinch, electropolished surface finish is well suited for use in high purity process applications. The GPCMA is available with a normally closed valve.

Resources

Drawings & CADs

Literature

Manuals

Device Description Files

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