Configuration Options

The following options are available for PPCMA Integrated Pressure Controllers with Mass Flow Meter
Ordering Code Example: PPCMA51T01102R8AV120

Configuration Option Option Code

PPCMA Pressure Controller with MFM

 PPCMA
Pressure Range Full Scale
10 Torr 11T
50 Torr 51T
100 Torr 12T
500 Torr 52T
1000 Torr 13T
100 mBar 12M
500 mBar 52M
1000 mBar 13M
1 kPa 10K
5 kPa 50K
10 kPa 11K
100 kPa 12K
Gas
Helium (001) 01
Argon (004) 04
Hydrogen (007) 07
Nitrogen (013) 13
Full Scale Flow Rate
5 sccm 500
10 sccm 101
20 sccm 201
50 sccm 501
100 sccm 102
200 sccm 202
500 sccm 502
1000 sccm 103
2000 sccm 203
5000 sccm 503
Fittings
Swagelok 4 VCR R
C-Seal C
Communications
DeviceNet 6
EtherCAT 8
Orifice Size
A (50 sccm) A
#1 (200 sccm) 1
#2 (1000 sccm) 2
#3 (5000 sccm) 3
Plug Material
Buna-N B
EPDM E
Neoprene N
Teflon T
Viton V
Valve Type
Normally Closed 1
Firmware
Customer must specify firmware version at time of order 10

Description
PPCMA Downstream Pressure Controller with Mass Flow Meter

PPCMA

Integrated Pressure Controller, Mass Flow Meter, PPCMA

Specifications

  • Type
    PPCMA Absolute Pressure Controller with Mass Flow Meter
  • Pressure Range
    5, 10, 20, 50, 100, 200, 500 or 1000 Torr Full Scale
  • Fitting Type
    Swagelok® 4 VCR® Male
    1.5 inch surface mount (C-seal)
  • Valve Position
    Normally Closed
  • Valve Seat
    PTFE (Teflon®), Elastomer (Viton®), Buna, Neoprene, EPDM
  • Flow Rate
    5, 10, 20, 50, 100, 200, 500, 1000, 2000, 5000 (N2 equivalent)
  • Pressure Readout Units
    Torr, kPa, mBar, psi
  • Pressure Resolution
    0.1 Torr
  • Pressure Control Accuracy
    ±1.0% of Reading (≥10% Full Scale)
    ±0.2% of Full Scale (<10% Full Scale)
  • Transducer Over Pressure Limit
    2x Full Scale for all ranges
  • Maximum Differential Pressure
    45 psid
  • Burst Pressure
    1500 psig
  • Control Mode
    Downstream
  • Pressure Measurement Accuracy
    ±0.5% of Reading
  • Zero Temperature Coefficient
    ±0.02% of Full Scale/°C
  • Span Temperature Coefficient
    ±0.04% of Reading/°C
  • Control Range
    >5 to 100% of Full Scale
  • Typical Response Time
    <1.0 second (excluding system time constant)
  • Operating Temperature
    10-50°C (50 to 122°F)
  • Storage Temperature
    -20 to 80°C (-4 to 176°F)
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • External Leak Integrity
    <1 x 10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <1.0% of orifice Full Scale
    (Nitrogen at 25 psig on inlet to atmosphere)
    (Nitrogen at 25 psig on inlet to atmosphere)
    <0.1% of orifice Full Scale - Elastomer
  • Flow Measurement Range
    2% to 100% of Full Scale
  • Flow Repeatability
    ±0.3% of Reading
  • Flow Resolution
    0.1% of Full Scale
  • Flow Accuracy
    ±1.0% of Reading >20% of Full Scale; ±0.2% of Full Scale (<20% of Full Scale flow)
    (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)
  • Flow Span Temperature Coefficient
    Span: <0.08% of Reading/°C
  • Flow Zero Temperature Coefficient
    Zero: <0.05% of Full Scale/°C
  • Wetted Materials
    Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, KM-45, Inconel® 718, 825 Incoloy®
    Optional: PTFE (Teflon) or Elastomer (Viton)
  • Surface Finish
    <10 µinches, average Ra electropolished
  • Power Required
    DeviceNet™: +11 to +25 VDC per (<4 watts)
    EtherCAT®: +24 VDC (<5 watts)
  • Connector-Interface
    DeviceNet™: 5 pin micro connector (power and comm.)
    EtherCAT®: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
  • Data Rate Switch
    DeviceNet™: 4 positions: 125, 250, 500K (Default), (programmable over network)
    EtherCAT®: No switch
  • EtherCAT Communication Rate
    100 Mbps
  • DeviceNet Communication Rate
    125 Kbps, 250 Kbps, 500 Kbps
  • MAC ID Switches
    DeviceNet™: 2 switches, 10 positions: 0,0 to 6,3, 1 to 254
    EtherCAT®: 3 switches, 16 positions
  • Network Size
    DeviceNet™: Up to 64 nodes
    EtherCAT®: Up to 4095 nodes
  • Indicators
    DeviceNet™: LED Network (green/red), LED Module (green/red)
    EtherCAT®: LED Power (green), LED Run (green), LED Error (red), LED Comm (green)
  • Weight
    <5 lbs (1.36 kg)
  • Compliance
    CE

Features

Applications

The PPCMA can be configured for 10 to 1000 Torr Full Scale pressure with a control range from 5 to 100% of Full Scale. The PPCMA pressure controller is suitable for transport chamber pressure control, critical backside wafer pressure control and process gas panel pressure balancing as well as run-vent pressure control applications. The valve and flow meter can be configured for Full Scale flow rates from 5 to 5000 sccm Full Scale depending on process conditions.

Digital I/O

The PPCMA is available with either digital (DeviceNet™ or EtherCAT®) I/O allowing for straightforward integration into new or retrofit applications. In-situ tuning and component diagnostics are enhanced through the device’s micro USB user interface accessible via virtually any PC with a web browser.

Resources

Manuals

Literature

Drawings & CADs

Device Description Files

Software

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