UHV Ultra-high Vacuum Isolation Valves

UHV Ultra-high Vacuum Isolation Valves are lightweight and have a compact profile, enabling it to fit easily into vacuum systems where space is tight. MKS has optimized the welded stainless steel bellows stroke length to ensure a long cycle life while maintaining high conductance.

NW25 - NW40
Ultra-high vacuum system applications
Metal bonnet seal limits outgassing and permeation for a lower base pressure
Spring-to-close, air-to-open pneumatic valve

See All Features

Description	Compatibility	Body Configuration	Actuation	Port Size	Flange Type	Price
UHV-25-ACC-ELVNUHV Isolation Valve, NW25, 2.75 in., Angle Ports, Viton/Copper, Pneumatic	UNIVERSAL	Angle	Pneumatic	NW25	2.75 in. CF	$774
UHV-40-ACC-ELVNUHV Isolation Valve, NW40, 2.75 in. CF, Angle Ports, Viton/Copper, Pneumatic	UNIVERSAL	Angle	Pneumatic	NW40	2.75 in. CF	$828
UHV-40-ACC-EMVMUHV Isolation Valve, NW40, 2.75 in. CF, Angle Ports, Viton/Copper, Manual	UNIVERSAL	Angle	Manual	NW40	2.75 in. CF	$646
UHV-40-ICC-ELVNUHV Isolation Valve, NW40, 2.75 in. CF, Inline Ports, Viton/Copper, Pneumatic	UNIVERSAL	Offset Inline	Pneumatic	NW40	2.75 in. CF	$919

Configuration Options

Please see the UHV Valve datasheet for available product options.

Description
UHV Vacuum Isolation Valve, Ultra-high Vacuum

Specifications

Type
Ultra-high Vacuum Valve
Vacuum Range
Atmosphere to 10^-9 Torr
Body Configuration
Offset Inline
Port Size
NW25, NW40
Flange Size
ISO-KF 25, ISO-KF 40, CF 2.75 in. depending on configuration

Flange Type
ISO-KF, CF, or Tube
Actuation
Manual or Pneumatic
Limit Switch
Optional
Seal
Viton
Bonnet Seal
Copper or Viton

Features

TIG Fusion-welded body

Another standard feature is a TIG fusion-welded body made of high grade, corrosion resistant 304 stainless steel for significantly fewer entrapment areas, resulting in less contaminants. The body is available with a choice of bead blasted or electropolished finishes.

UHV Applications

The UHV Valve is a compact vacuum valve designed for use in ultra-high vacuum systems, for physical vapor deposition, high energy physics, mass spectrometry and other applications that require an ultraclean environment.

Accessories

Replacement Solenoids

Description	Compatibility	Price
100008163Solenoid Valve, Replacement, 24 VDC, 7 Watt	UNIVERSAL	$179
100008165Replacement Solenoid Valve, 120 VAC, 50-60 Hz, 7.5 Watt	UNIVERSAL	$233
100008164Solenoid Valve, Replacement, 24 VAC, 50-60 Hz, 6 Watt	UNIVERSAL	$221
100008167Solenoid Valve, Replacement, 220-240 VAC, 50-60 Hz, 7.5 Watt	UNIVERSAL	$189
100008166Solenoid Valve, Replacement, 208 VAC, 50-60 Hz, 7.5 Watt	UNIVERSAL	$153
100008539Solenoid Valve, Replacement, 12 VDC, 7 Watt	UNIVERSAL	$111

Valve Seals

Description	Compatibility	Price
100010361O-Ring and Metal Seal Set, Viton Nose, Copper Bonnet, UHV Valve, NW25 Port	UNIVERSAL	$54
100010362O-Ring and Metal Seal Set, Viton Nose, Copper Bonnet, UHV Pneumatic Valve, NW40 Port	UNIVERSAL	$44
100010363O-Ring and Metal Seal Set, Viton Nose, Copper Bonnet, UHV Manual Valve, NW40 Port	UNIVERSAL	$23.10
100011771O-Ring Seals, Viton, UHV Valve, NW25 Port	UNIVERSAL	$62
100011772O-Ring Seals, Viton, Pneumatic UHV Valve, NW40 Port	UNIVERSAL	$55
100011773O-Ring Seals, Viton, Manual UHV Valve, NW40 Port	UNIVERSAL	$60

Limit Switches

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		100010913Valve Retro Fit Kit with Limit Switch, UHV Valve, NW25	UNIVERSAL			$861
		100010914Valve Retro Fit Kit with Limit Switch, Pneumatic UHV Valves, NW40	UNIVERSAL			$746

Internal Rebuild Kits

Description	Compatibility	Price
100011774Valve Rebuild Kit with Viton Seal Set, Pneumatic UHV Valves, NW25	UNIVERSAL	$525
100002652Pneumatic Valve Rebuild Kit, Viton Nose, Copper Bonnet, UHV Valve, NW25	UNIVERSAL	$453
100009979Valve Rebuild Kit, Viton Nose, Copper Bonnet, Manual UHV Valves, NW40	UNIVERSAL	$508
100009978Valve Rebuild Kit, Viton Nose, Copper Bonnet, Pneumatic UHV Valves, NW40	UNIVERSAL	$625
100011775Valve Rebuild Kit with Viton Seal Set, Pneumatic UHV Valves, NW40	UNIVERSAL	$689
100011776Valve Rebuild Kit with Viton Seal Set, Manual UHV Valves, NW40	UNIVERSAL	$641

UHV Ultra-high Vacuum Isolation Valves

UHV Ultra-high Vacuum Isolation Valves

Configuration Options

Specifications

Features

TIG Fusion-welded body

UHV Applications

Accessories

Replacement Solenoids

Valve Seals

Limit Switches

Internal Rebuild Kits

Resources

Literature

Manuals