- Replacement actuators for vacuum valves
- Service or maintain a vacuum valve
- Spare parts for limited downtime See All Features
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
![]() | 1084882Valve Actuator, HFV High Flow and High Conductance Valve, NW100 | |||||
![]() | 100016358Valve Actuator, HFV High Flow and High Conductance Valve, NW200 or NW250 Port | |||||
![]() | 1084830-001Valve Bellows, HFV High Flow/High Conductance Valve, NW100 | |||||
![]() | 100016258Valve Bellows, HFV High Flow/High Conductance Valve, NW160 | |||||
![]() | 100016362Valve Bellows, HFV High Flow/High Conductance Valve, NW200 or NW250 | |||||
![]() | 20000641-001Valve Nosepiece, HFV High Flow/High Conductance Valves, NW100 | |||||
![]() | 100016261Valve Nosepiece, HFV High Flow/High Conductance Valves, NW160 | |||||
![]() | 100016278Valve Nosepiece, HFV High Flow/High Conductance Valves, NW200 | |||||
![]() | 100016365Valve Nosepiece, HFV High Flow/High Conductance Valve, NW250 Port |
Resources
Literature
MKS Isolation Valve Spares & Kits(2.6 MB, PDF)



