627H 0.02-25,000 Torr, Heated (45°C) Absolute Baratron® Capacitance Manometers
Model: 627H
627H 0.02-25,000 Torr, Heated (45°C) Absolute Baratron® Capacitance Manometers
Model: 627H

Overview
Overview
The 627H Heated (45°C) Absolute Baratron® Capacitance Manometer is temperature controlled to 45°C, accurate to 0.12% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability. Optional heater and temperature status LED/switches indicate that the heater (which maintains the sensor temperature to 45°C) is in control. This capacitance manometer is available in Full Scale ranges down to 20 mTorr (0.03 mbar) to accommodate today’s lower process pressures. Based on established Baratron capacitance manometer technology, the sensor's wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is inter-changeable with earlier Baratron® capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or the user's compatible power supply/readout devices.
Technical Specs
- TypeVacuum/pressure Transducer
- Measurement TypeAbsolute
- Sensor Temperature45°C
- Full Scale Range20000 Torr
- Accuracy0.15% of Reading
- Resolution0.001% of Full Scale (0.002% of Full Scale for 0.02 and 00.5 Torr)
- Fitting Type2.75 in. OD CF
- Analog Output0-10 VDC
- Analog Connector15-pin D with Thread Locks
- Zero Temperature Coefficient0.002% of Full Scale/°C for 1 - 25000 Torr range, 0.005% of Full Scale/°C for 0.25 and 0.1 Torr, 0.015% of Full Scale/°C for 00.5 Torr, 0.03% of Full Scale/°C for 0.02 Torr
- Span Temperature Coefficient0.02% of Rdg./°C
- Operating Temperature Range15-40°C
- Volume6.3 cc
- Warm-up Time2 hours for 25000 Torr Full Scale, 4 hours for 0.1 Torr Full Scale and lower
- Overpressure Limit45 psia (310 kPa) or 120% of Full Scale, whichever is greater
- Exposed MaterialsInconel
- Power Requirements±15 VDC ±5% @ 0.25 Amps (max.)
- Compliancece
Technical Specs
- TypeVacuum/pressure Transducer
- Measurement TypeAbsolute
- Sensor Temperature45°C
- Full Scale Range20000 Torr
- Accuracy0.15% of Reading
- Resolution0.001% of Full Scale (0.002% of Full Scale for 0.02 and 00.5 Torr)
- Fitting Type2.75 in. OD CF
- Analog Output0-10 VDC
- Analog Connector15-pin D with Thread Locks
- Zero Temperature Coefficient0.002% of Full Scale/°C for 1 - 25000 Torr range, 0.005% of Full Scale/°C for 0.25 and 0.1 Torr, 0.015% of Full Scale/°C for 00.5 Torr, 0.03% of Full Scale/°C for 0.02 Torr
- Span Temperature Coefficient0.02% of Rdg./°C
- Operating Temperature Range15-40°C
- Volume6.3 cc
- Warm-up Time2 hours for 25000 Torr Full Scale, 4 hours for 0.1 Torr Full Scale and lower
- Overpressure Limit45 psia (310 kPa) or 120% of Full Scale, whichever is greater
- Exposed MaterialsInconel
- Power Requirements±15 VDC ±5% @ 0.25 Amps (max.)
- Compliancece
Resources & Downloads
Drawings & CADs
627 Dimensional Drawing(125 kB, PDF)
