GM50A/GM51A Metal-sealed 5-50,000 sccm Mass Flow Controllers
Model: GM51A
GM50A/GM51A Metal-sealed 5-50,000 sccm Mass Flow Controllers
Model: GM51A
Overview
Overview
The GM51A digitally-controlled mass flow controller is available with either analog (0 to 5 VDC or 4 to 20 mA) or RS485, Profibus™, EtherCAT®, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas. I/O protocols are designed to allow the GM50A to easily replace RS485, Profibus and DeviceNet versions on earlier generations of MKS as well as many other suppliers MFCs. A standard 3-inch footprint enables its use without modifying existing gas line configurations. The GM51A mass flow controller has an electro polished surface finish. The GM51A is a general purpose MFCs designed for a wide variety of applications requiring flow control capability from 10 sccm to 50 slm Full Scale, N2 equivalent, and is also suitable for high purity processes.
Technical Specs
- TypeMass Flow Controller/Meter
- Full Scale Flow Range5 sccm - 50 slm (N2 equivalent)
- Control Range2 - 100% of Full Scale (range on mech.)
- Fitting TypeSwagelok® 4 VCR® male, 0.25 in. Swagelok compression seal, surface mount, Swagelok 8 VCR male, 0.125 in. Swagelok, 0.5 in. Swagelok, 6 mm Swagelok, 8 mm Swagelok, KF16, 0.375 in. Swagelok, 12mm Swagelok, 2 VCR male
- Seal MaterialMetal
- Flow Input Output Signal0 - 5 VDC, 4 - 20 mA
- DeviceNet Connector5-pin micro connnector (power and comm.)
- RS485 Connector9-pin type "D" male (power and comm.)
- Profibus Connector9-pin type "D" male (power), 9-pin type "D" female (comm.)
- EtherCAT Connector2 x RJ45 (comm.) male, M8 male, 5-pin (power)
- PROFINET Connector2 x RJ45 (comm.) male, M8 male, 5-pin (power)
- Maximum Inlet Pressure150 psig (can not exceed pressure differential requirement across MFC)
- Normal Operating Pressure Differential5 - 5000 sccm: 10 - 40 psid, 10000 - 20000 sccm: 15 - 40 psid, 30000 - 50,000 sccm: 25 - 40 psid (N2 Full Scale with atmospheric pressure at the MFC outlet)
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Typical Accuracy±1% of set point for 20 - 100% Full Scale, ±0.2% of Full Scale for 2 - 20% Full Scale (with N2 calibration gas)
- Repeatability±0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Inlet Pressure Coefficient<0.02% of Reading/psi
- Typical Settling Time<750 msec, above 5% (per SEMI Guideline E-17-0600)
- Warm-up Time<30 minutes (to within 0.2% of Full Scale of steady state performance)
- Operating Temperature10 - 50°C
- Storage Humidity0 - 95% Relative Humidity, non - condensing
- Storage Temperature-20 - 80°C ( -4 - 149° F)
- External Leak Integrity<1 x 10-10 (scc/sec He)
- Leak Integrity Through Closed Valve<1.0% of Full Scale at 40 psig inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is required.)
- Wetted Materials316L stainless steel VAR (equivalent to 316 stainless steel SCQ for semiconductor quality), 316 stainless steel, Elgiloy®, Nickel, KM45, Teflon® (MFC only)
- Surface FinishMFC: 10 µ inch average Ra, MFM: 16 µ inch average Ra
- Power Requirements15 - 24 VDC @ (<4 watts)
- DeviceNet Input Power Required11 - 25 VDC per (<4 watts)
- RS485 Input Power Required15 - 24 VDC per (<4 watts)
- Profibus Input Power Required15 - 24 VDC per (<4 watts)
- EtherCAT Input Power Required24 VDC per (<5 watts)
- PROFINET Input Power Required24 VDC per (<5 watts)
- RS485 Data Rate Switch SelectionNo switch. Set data rate via RS485
- DeviceNet Data Rate Switch Selection4 positions: 125, 250, 500K (default)programmable over network
- EtherCAT Data Rate Switch SelectionNo switch
- Profibus Data Rate Switch SelectionNo switch. Set data rate via Profibus®
- PROFINET Data Rate Switch SelectionNo switch
- DeviceNet Communication RateData Rate (user selectable), 125 Kbps, 500 meters (1,640 ft.), 250 Kbps, 250 meters (820 ft.), 500 Kbps, 100 meters (328 ft.)
- Profibus Communication Rate9.6 Kbps to 12 Mbps
- RS485CommunicationRateData Rate (user selectable), 9.6 Kbps, 1200 meters (4,000 ft.), 19.2 Kbps, 1200 meters (4,000 ft.), 38.4 Kbps, 1200 meters (4,000 ft.)
- EtherCAT Communication Rate100 Mbps
- PROFINET Communication Rate100 Mbps
- DeviceNet MAC ID Switches Addresses2 switches, 10 positions, 0,0 to 6,3, 1 to 254
- RS485 MAC ID Switches AddressesSet address over RS485, station addresses 0,0 to 9,9
- Profibus MAC ID Switches Addresses2 switches, 10 positions
- EtherCAT MAC ID Switches Addresses3 switches, 16 positions
- DeviceNet Network SizeUp to 64 nodes
- RS485 Network SizeUp to 32 nodes
- Profibus Network SizeUp to 99 nodes
- DeviceNet IndicatorsLED network status (green/red), LED module status (green/red)
- EtherCAT Network SizeUp to 4095 nodes
- PROFINET IndicatorsLED Maint (amber), LED BUS Fault (red), LED Ready (green), LED Sys Fault (red)
- EtherCAT IndicatorsLED Power (green), LED Run (green), LED Error (red), LED /Comm (green)
- RS485 IndicatorsLED Comm (yellow), LED Error (red)
- Profibus IndicatorsLED Comm (green/red), LED Error (green/red)
- Width1.25 in.
- Weight<3 lbs. (1.4 kg)
- ComplianceCE
Technical Specs
- TypeMass Flow Controller/Meter
- Full Scale Flow Range5 sccm - 50 slm (N2 equivalent)
- Control Range2 - 100% of Full Scale (range on mech.)
- Fitting TypeSwagelok® 4 VCR® male, 0.25 in. Swagelok compression seal, surface mount, Swagelok 8 VCR male, 0.125 in. Swagelok, 0.5 in. Swagelok, 6 mm Swagelok, 8 mm Swagelok, KF16, 0.375 in. Swagelok, 12mm Swagelok, 2 VCR male
- Seal MaterialMetal
- Flow Input Output Signal0 - 5 VDC, 4 - 20 mA
- DeviceNet Connector5-pin micro connnector (power and comm.)
- RS485 Connector9-pin type "D" male (power and comm.)
- Profibus Connector9-pin type "D" male (power), 9-pin type "D" female (comm.)
- EtherCAT Connector2 x RJ45 (comm.) male, M8 male, 5-pin (power)
- PROFINET Connector2 x RJ45 (comm.) male, M8 male, 5-pin (power)
- Maximum Inlet Pressure150 psig (can not exceed pressure differential requirement across MFC)
- Normal Operating Pressure Differential5 - 5000 sccm: 10 - 40 psid, 10000 - 20000 sccm: 15 - 40 psid, 30000 - 50,000 sccm: 25 - 40 psid (N2 Full Scale with atmospheric pressure at the MFC outlet)
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Typical Accuracy±1% of set point for 20 - 100% Full Scale, ±0.2% of Full Scale for 2 - 20% Full Scale (with N2 calibration gas)
- Repeatability±0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Inlet Pressure Coefficient<0.02% of Reading/psi
- Typical Settling Time<750 msec, above 5% (per SEMI Guideline E-17-0600)
- Warm-up Time<30 minutes (to within 0.2% of Full Scale of steady state performance)
- Operating Temperature10 - 50°C
- Storage Humidity0 - 95% Relative Humidity, non - condensing
- Storage Temperature-20 - 80°C ( -4 - 149° F)
- External Leak Integrity<1 x 10-10 (scc/sec He)
- Leak Integrity Through Closed Valve<1.0% of Full Scale at 40 psig inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is required.)
- Wetted Materials316L stainless steel VAR (equivalent to 316 stainless steel SCQ for semiconductor quality), 316 stainless steel, Elgiloy®, Nickel, KM45, Teflon® (MFC only)
- Surface FinishMFC: 10 µ inch average Ra, MFM: 16 µ inch average Ra
- Power Requirements15 - 24 VDC @ (<4 watts)
- DeviceNet Input Power Required11 - 25 VDC per (<4 watts)
- RS485 Input Power Required15 - 24 VDC per (<4 watts)
- Profibus Input Power Required15 - 24 VDC per (<4 watts)
- EtherCAT Input Power Required24 VDC per (<5 watts)
- PROFINET Input Power Required24 VDC per (<5 watts)
- RS485 Data Rate Switch SelectionNo switch. Set data rate via RS485
- DeviceNet Data Rate Switch Selection4 positions: 125, 250, 500K (default)programmable over network
- EtherCAT Data Rate Switch SelectionNo switch
- Profibus Data Rate Switch SelectionNo switch. Set data rate via Profibus®
- PROFINET Data Rate Switch SelectionNo switch
- DeviceNet Communication RateData Rate (user selectable), 125 Kbps, 500 meters (1,640 ft.), 250 Kbps, 250 meters (820 ft.), 500 Kbps, 100 meters (328 ft.)
- Profibus Communication Rate9.6 Kbps to 12 Mbps
- RS485CommunicationRateData Rate (user selectable), 9.6 Kbps, 1200 meters (4,000 ft.), 19.2 Kbps, 1200 meters (4,000 ft.), 38.4 Kbps, 1200 meters (4,000 ft.)
- EtherCAT Communication Rate100 Mbps
- PROFINET Communication Rate100 Mbps
- DeviceNet MAC ID Switches Addresses2 switches, 10 positions, 0,0 to 6,3, 1 to 254
- RS485 MAC ID Switches AddressesSet address over RS485, station addresses 0,0 to 9,9
- Profibus MAC ID Switches Addresses2 switches, 10 positions
- EtherCAT MAC ID Switches Addresses3 switches, 16 positions
- DeviceNet Network SizeUp to 64 nodes
- RS485 Network SizeUp to 32 nodes
- Profibus Network SizeUp to 99 nodes
- DeviceNet IndicatorsLED network status (green/red), LED module status (green/red)
- EtherCAT Network SizeUp to 4095 nodes
- PROFINET IndicatorsLED Maint (amber), LED BUS Fault (red), LED Ready (green), LED Sys Fault (red)
- EtherCAT IndicatorsLED Power (green), LED Run (green), LED Error (red), LED /Comm (green)
- RS485 IndicatorsLED Comm (yellow), LED Error (red)
- Profibus IndicatorsLED Comm (green/red), LED Error (green/red)
- Width1.25 in.
- Weight<3 lbs. (1.4 kg)
- ComplianceCE
Resources & Downloads
Drawings & CADs
GM51A Mass Flow Controller Dimensional Drawing(552.7 kB, PDF)