Dissolved Ammonia Delivery System

The DI-Solver™ NH3 is a compact, stand-alone system designed to provide dissolved ammonia water for use in rinsing processes in the semiconductor industry. With Semiconductor 3D IC architectures using new materials like Cu-Co and Si-SiGe, the ability to wet clean with precise alkaline chemistries is growing in frequency and importance. The system is specifically designed to provide optimal cleaning capability at a given conductivity. The alkaline chemistry of dissolved ammonia provides ESD protection during rinsing, particle lift-off, and residual particle removal. It also prevents corrosion of metal interfaces, which is a common problem in semiconductor manufacturing. The system uses closed-loop control to keep conductivity and pressure stable under changing flow conditions. It also monitors and adjusts the NH4OH concentration to deliver the desired level of dissolved ammonia.

MKS' Di-Solver NH3 leverages the established and proven architecture of LIQUOZON® VariO3 Ozonated Water Delivery System, integrating high purity standard materials and safety features in a rugged system to meet the demands of advanced technology manufacturing.

Best dynamic conductivity control and accuracy at point of use from proprietary control of gas
Increases yields by inhibiting Electro Static Discharge
Improves interconnect reliability and yield by preventing metal surface and post CMP clean corrosion

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	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		DI-NH3Water Delivery System, Ammonia Water	UNIVERSAL

Specifications

Outlet Pressure
Configurable 1.0-3.0 bar_g (3.7bar_g with outlet pump)
Plumbing Materials
Liquid Wetted Surfaces: PFA, PTFE, quartz glass
Gas Wetted Surfaces: 316L stainless steel, PFA, PTFE
Communication
Binary in/out, RS232/RS485, analog 4-20 mA in/out, USB

Dimensions
Coated steel, approximately 1810 mm high, 800 mm wide, 610 mm deep (71.2 x 31.5 x 24.1 in.)
Overall height: approx. 2000 mm (79 in.)
Weight
290-300 kg, depending on configuration
Compliance
CE, SEMI S2, SEMI F47, NRTL

Features

Benefits

Leading Technology

Patented system to deliver dilute NH4OH based on ammonia gas ultra-pure water mixing
Precise gas dosage through proprietary mass flow controller system

Process

Precise conductivity control range of 5 to 121 μS/cm
Up to 40 lpm flow
Stable setpoint at varying flow rates
Analog and digital communication with remote control

Reliability & Maintenance

Repeatable unit to unit performance
Field proven sub-components life
Easy installation and operation

Performance & Operation

MKS’ DI-Solver NH3 leverages the established and proven architecture of LIQUOZON® Ozonated Water Delivery System, integrating high purity standard materials and safety features in a rugged system to meet the demands of advanced technology manufacturing.

The below figures show the possible performance ranges of different configurations that provide a conductivity range of 5 to 40 μS/cm at 0.5 to 40 lpm (Figure 1), or 5-121 μS/cm at 0.5 to 32 lpm (Figure 2).

Di-Solver NH3 Conductivity range of 5 to 40 µS/cm at 0.5 to 40 lpm

Figure 1 - Conductivity range of 5 to 40 µS/cm at 0.5 to 40 lpm

Di-Solver NH3 Conductivity range of 5-121 µS/cm at 0.5 to 32 lpm

Figure 2 - Conductivity range of 5-121 µS/cm at 0.5 to 32 lpm

Specified achievable ammonia conductivity in UPW for a system pressure of 2.5 barg, a cooling water temperature and UPW temperature of 20°C.

Facility Requirements

N2: ≥ Grade 4 (purity ≥ 99.99%), dew point <-40°C

Inlet Pressure: 4.5-7.6 barg (65-110 psig), at least higher 3 bar than system pressure
Standard Flow Rate: ≤10 slm, according to SEMI E12 (0°C / 1.01325 bar)

Ammonia (NH3): ≥ Grade 4.5 (purity ≥ 99.995%)

Inlet Pressure: 3.0-5.0 barg (44-73 psig)
Standard Flow Rate: ≤ 2.0 slm, according to SEMI E12 (0°C / 1.01325 bar)

Ultra-Pure Water (UPW): <0.1 ppb metals, <10 particles/ml of 0.1µm size, free of organics

UPW IN Pressure: 1.3-4 barg (14.5-73 psig), at least 1.3 bar higher than system pressure
Temperature: 20-25°C (59-77°F), rated 20°C (68°F)

Clean Dry Air (CDA): Filtration, free of oils and particles

Pressure: 6.0-8, 3 barg (87-120 psig)
Flow Rate: ≤ 15 slm, typically 10.0 slm according to SEMI E12 (0°C / 1.01325 bar)

Exhaust:

Cabinet Underpressure: >8mm (0.32 in.) water column
Standard Flow Rate: >70m3/h, acc to SEMI S6 (21.1°C / 1.01325 bar)

Power: 200-208 V ±10%

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