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Heated Valves
MKS heated vacuum valves are specifically designed to withstand high internal temperatures to limit process by-product buildup and reduce system maintenance.
Jalapeño Heated Vacuum Isolation Valves
- Maintains optimal valve conductance ensuring materials don’t solidify and clog the system
- Actuator thermal barrier design improves internal thermal performance and reduces external temperature to safe touch levels
- Formed bellows-sealed poppet valve reduces particle trapping resulting in high cycle life
Heated Vacuum Isolation Ball Valves
- KF 40 and KF 50
- Designed with straight-through flow paths and less sensitive to contamination
- Designed for heated use up to 150°C