This highly flexible vacuum system controller supports a wide range of sensor technologies, including Baratron® capacitance manometers, cold cathode, hot cathode, standard Pirani and convection Pirani sensors for a measurement range from ultra-high vacuum to above atmospheric pressure. In addition, the Series 946 Controller will also monitor and control MKS mass flow controller Types I, G, or P Series and legacy mass flow controllers along with MKS pressure control valves.

Internal communication between sensor cards, provides a combined output across as many as three sensors for one continuous pressure reading. The internal control feature provides automatic control of ion gauges, protecting them from accidental power on at high pressures. The Series 946 also provides set point relays for external signals and control and may be configured to provide upstream or downstream system pressure control. Serial communications and individual analog outputs are also furnished as standard features.

The Series 946 provides twelve user programmable set point relays with adjustable hysteresis, four assigned to each of the three card slots. The analog outputs can be programmed as linearly scaled, logarithmically scaled, or as set points, and can be assigned to any of the six sensor channels.

With the installation of a valve drive card, fast and accurate closed-loop digital PID pressure control is achieved with an MKS gas proportioning valve or exhaust throttle valve. Additionally, upstream pressure control can be accomplished with a mass flow controller and an MFC card operating in ratio mode.