Sorry, this product is no longer offered for sale. For recommended replacements see remote-rf-plasma-sources.
ASTRON® ex 6.0 slm NF3 Flow Remote Plasma Source
ASTRON® ex 6.0 slm NF3 Flow Remote Plasma Source
ASTRON® ex reactive gas generators are high output, self-contained reactive species sources for chamber cleaning applications. ASTRON ex reactive gas generators use patented Low-Field-Toroidal plasma technology to efficiently dissociate input gas to produce downstream reactive chemistries.
Specifications
- TypeAX7685 Reactive Gas Generator
- Gas Supply During Ignition100% Ar
- Gas Supply Post IgnitionUp to 6 slm of NF3 (after plasma ignition NF3 can be added and the Ar removed)
Contact MKS for alternate gas capability - NF3 Operation Reactant Output>95% dissociation up to 6 slm NF3 at 5 Torr (0.5 slm to 6.0 slm typical)
- InputsOn/Off
- OutputsReady, AC line, Plasma On
- Gas Flow1 to 4 Torr during ignition measured at ASTRON outlet
1 to 10 Torr post ignition measured at ASTRON outlet once flow is stabilized - Wetted Materials6061-T6 Aluminum hardcoat anodized, 6061-T6 Aluminum, Chemraz®, Alumina
- Operating TemperatureAmbient 40°C max.
- Cooling Water Required2.0 gpm, < 30°C
- Control Interface9 and 25 pin D connectors, opto-isolated I/O
- Power Requirements187 to 228 VAC, 50/60 Hz, 60A, 3 phase
- Dimensions16.7 in. L x 14.5 in. W x 10.1 in. H (424 x 368 x 26 mm nominal)
- Weight74 lb. (33.5 kg)
- ComplianceCE, SEMI S2-0200, SEMI F47