CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Controller
CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Controller
The CMA10B Mass Flow Controller (MFC) is a compact, fast response model using a Micro-Electro-Mechanical Systems (MEMS) based flow sensor for non-corrosive gas applications. The device is available in Full Scale flow rates from 15 to 14000 sccm, N2 with a control range from as low as 0.1% of Full Scale up to 100% of Full Scale and is also available as a flow meter. Either analog (0 to 5 VDC) or digital (RS485, PROFINET® or Modbus TCP/IP) communication interfaces are available. The required power supply voltage is 24 VDC nominal.
- Ultrafast response time of <100 msec
- Control range from 0.1 to 100% of Full Scale
- Accuracy of ±0.8% of set point
- Minimal zero and span drift assure long term reproducibility
- Surface mount interface available for compact gas panel design
- Embedded web browser for setup and diagnostics See All Features
Configuration Options
The following options are available for CMA10B Mass Flow Controllers & Meters
Ordering Code Example: CMA10B013102RCV1010
|
Configuration Option |
Option Code |
|---|---|
Controller |
|
| CMA10B | CMA10B |
Gas (Per Semi Standard E52-0703) |
|
| He | 001 |
| Ar | 004 |
| Air | 008 |
| N2 | 013 |
| O2 | 015 |
| SF6 | 110 |
| For other gases, contact MKS Instruments Flow range is based on gas - see the Selection Table below. |
|
Flow Range Full Scale |
|
| 50 sccm | 501 |
| 100 sccm | 102 |
| 200 sccm | 202 |
| 500 sccm | 502 |
| 1000 sccm | 103 |
| 2000 sccm | 203 |
| 5000 sccm | 503 |
| 10000 sccm | 104 |
Fittings (compatible with) |
|
| 4 VCR Male | R |
| 0.25 in. Compression | S |
| Downmount O-ring Seal | C |
| For other options, contact MKS Instruments | |
Connector |
|
| Dual I/O (Analog 9-Pin/RS485 ASCII) RS-485 Primary | R |
| Dual I/O (Analog 9-Pin/RS485 ASCII) Analog Primary | C |
| Modbus TCP | M |
| PROFINET | 9 |
Seal Materials |
|
| Viton | V |
Valve/Device Type |
|
| Normally Closed/Mass Flow Controller (MFC) | 1 |
| No Valve/Mass Flow Meter (Same length as MFC) | 3 |
| No Valve/Mass Flow Meter (Reduced Length) Reduced length not available for W-Seal or Downmount O-ring Seal fittings |
4 |
| Reserved (future use) | |
| Standard Build | 0 |
Firmware |
|
| RS485/Analog Dual I/O | 10 |
| Modbus TCP | 10 |
| PROFINET | 10 |
Specifications
- TypeMass Flow Controller
- Full Scale Flow Range15-14,000 sccm (N2)
- Maximum Inlet Pressure80 psig
- Normal Operating Pressure Differential15 to 7000 sccm: 10 to 45 psid (N2)
7001 to 14000: 15 to 45 psid (N2) - Proof Pressure232 psi/16 bar
- Burst Pressure1000 psi/70 bar
- Control RangeDigital I/O: 0.1-100% of Full Scale
Analog I/O: 0.2-100% of Full Scale
(typical) - Typical Accuracy±0.8% of set point for 20-100% Full Scale
±0.16% of Full Scale for <20% of Full Scale
(with N2 calibration gas) - Repeatability±0.2% of Reading
- Zero Temperature Coefficient≤0.005% of Full Scale/°C
- Span Temperature Coefficient≤0.06% of Reading/°C
- Pressure Coefficient<0.025% of Reading/psi
- Response Time≤100 ms typical above 10% Full Scale, 50 sccm - 5 slm Full Scale models
≤150 ms typical above 10% Full Scale, 10 slm Full Scale models
(per SEMI Guideline E-17-0600) - Warm-up Time≤1 min
- Operating Temperature10-50°C (32-122°F)
- Storage Temperature0-60°C (32-140°F)
- Fitting TypeCompatible with:
Swagelok® 4 VCR® male
surface mount (o-ring)
0.25 in. Swagelok compression - External Leak Integrity<1 x 10-09 (scc/sec He)
- Leak Integrity Through Closed Valve<0.1% of max. Full Scale range using valve closed override command
(to assure no flow-through, a separate positive shut-off valve is required) - Wetted MaterialsAluminum, Elgiloy®, 20# Steel, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top
- Seal MaterialViton
- Valve PositionNormally closed
- Set Point Command Signal0-5 VDC (0-10 VDC, optional)
- Power Requirements24 VDC @ (±10%), <4 watts
- Flow Input Output Signal0-5 VDC (0-10 VDC, optional)
- Analog I/O Connector9-pin Type D
- Weight0.68 lbs (310 grams) (w/VCR fitting)
- ComplianceCE
Features
CMA10B Selection Guide
C-Series mass flow controllers and meters are selected based on the gas and range desired. Use this table to determine the best model for your application:
| CMA10B | |||
| Gas SEMI# | Gas Symbol | Minimum Full Scale | Maximum Full Scale |
| 1 | He | 23 | 16000 |
| 4 | Ar | 40 | 14000 |
| 8 | Air | 15 | 14000 |
| 13 | N2 | 15 | 14000 |
| 15 | O2 | 14 | 13000 |
| 110 | SF6 | 7 | 4500 |
C-Series Overview
The CMA10B compact design is only 1 inch (25.4 mm) and less than 4.4 inches (111.8 mm) high. It has standard lengths of 4.88 inches (124 mm) for 4 VCR® male and 4.54 inches (113 mm) for 0.25 inch compression seal gas line connections. Downmount versions are also available. A low thermal mass MEMS sensor provides rapid sensing of flow changes with low noise output. The solid state design of the sensor makes it resistant to water condensation, particles, pressure shock and vibration.
Fast response, wide dynamic control range, and 0.8% of set point accuracy make this MFC an excellent choice for flow control in critical process applications where noncorrosive gases are used. Typical uses can be found in mass spectroscopy, vacuum coating, bioreactor as well as many other applications. The CMA10B incorporates a fast-acting solenoid control valve coupled with the flow sensor via the MFC's superior flow signal processing and control algorithm. This results in response times to set point of less than 100 milliseconds.
C-Series Communication Options
| Digital I/O | RS485 | PROFINET® | Modbus |
|---|---|---|---|
| Input Power Required | 24 VDC @ (±10%), <4 watts | +24 VDC (<5 watts) | +24 VDC (<5 watts) |
| Connector | 9 pin Type D male (power and comm.) | 2 x RJ-45 (comm.) male, M8 male, 5 pin (power) | 1 x RJ-45 (comm.) male,DC power plug |
| Data Rate Switch/Selection | No switch Set data rate via RS485 |
MFC: No switch MFM: N/A |
N/A |
| Comm. Rate(s) | 9.6 Kbps 19.2 Kbps 38.4 Kbps |
MFC: 100 Mbps MFM: N/A |
N/A |
| MAC ID Switches/Addresses | Set address over RS485 Station Addresses 0,0 to 9,9 | N/A | N/A |
| Network Size | Up to 32 nodes | N/A | N/A |
| Visual Indicators | LED Power LED Run (green) |
LED Maint (amber) LED BUS Fault (red) LED Ready (green) LED Sys Fault (red) |
LED Module LED Network |
| Compliance | CE | CE | CE |
Resources
Manuals
C-Series Mass Flow Controller/Meter Manual(2 MB, PDF) C-Series Mass Flow Controller Pin-outs(94 kB, PDF) C-Series MFC/MFM Modbus Register Map & Specification(135.9 kB, PDF)
Drawings & CADs
C-Series Mass Flow Controller/Meter 3D Model Files C-Series Mass Flow Controller Dimensional Drawing(2 MB, PDF)
