High Power Microwave Plasma System
High Power Microwave Plasma System
The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.
- High power microwave plasma system @ 2.45 GHz
- Advanced closed loop power control with <1% output accuracy variation
- Instant plasma ignition
- Auto tune system within <1.5 seconds See All Features
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | HMPX60Q-MKSMicrowave Plasma System, High Power, 6.0 kW, 2,440-2,470 MHz, Quartz | |||||
| HMPX60S-MKSMicrowave Plasma System, High Power, 6.0 kW, 2,440-2,470 MHz, Sapphire |
Specifications
- Maximum Plasma Power Output6.0 kW
- Frequency2,440-2,470 MHz
- Ripple2,440-2,470 MHz
- Output Accuracy<1% closed loop control
- Ambient TemperatureUp to 40°C max
- Generator to Head DistanceUp to 100 feet max
- Microwave ConnectionsWR284F waveguide with CPR284F flanges
- Power Requirements200-208 VAC, 3 phase, 50/60 Hz
- Autotune<1.5 seconds with <2% reflected power
- ChemistriesO2, N2H2, N2, H2O, NH3, H2
- Applicator MaterialQuartz or Sapphire
- Gas Flow Range1 - 10 slm
- Operating Pressure1 - 10 Torr
- CommunicationsAnalog, RS485
- ComplianceCE
- ConfigurationKF40, custom
- CoolingWater: 1 GPM, 20-30°C, 71 PSI max (applicator requires exclusive water cooling supply at 0.50 GPM)
- Power Supply Generator Dimensions(7U rack) 19 H x 12.2 W x 20.03 D in. (482.6 x 309.88 x 508.76 mm)
- Power Head Magnetron Head Dimensions9.85 H x 9.85 W x 16 D in. (250.19 x 250.19 x 406.4 mm)
- Power Head Magnetron Head CoolingWater: 1 GPM, 20-30°C, 71 PSI max
- RegulationBetter than 1% of output power (line and load)
Resources
Drawings & CADs
High Power Microwave Plasma System Dimensional Drawing(792.8 kB, PDF)
Literature
High Power Microwave Plasma System(556.5 kB, PDF)