High Power Microwave Plasma System
Model: HMPX60S-MKS
High Power Microwave Plasma System
Model: HMPX60S-MKS
Overview
Overview
The HMPX60S-MKS High Power Microwave Plasma System with a sapphire applicator material features a 6.0 kW Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates. With the ability to ignite in various process gases over a wide operating range within seconds, the High Power Microwave Plasma System is compatible with current and advanced applications such as photoresist removal post-HDIIS implant, advanced surface cleaning and conditioning, and advanced deposition applications.
Technical Specs
- TypeMicrowave Plasma System
- Power Output6.0 kW
- Frequency2,440 - 2,470 MHz
- Output Accuracy<1% closed loop control
- Ambient TemperatureUp to 40°C max
- Generator to Head DistanceUp to 100 feet max
- Microwave ConnectionsWR284F waveguide with CPR284F flanges
- Power Requirements200-208 VAC, 3 phase, 50/60 Hz
- Autotune<1.5 seconds with <2% reflected power
- ChemistriesO2, N2H2, N2, H2O, NH3, H2
- Applicator MaterialSapphire
- Operating Pressure1 - 10 Torr
- ComplianceCE
- ConfigurationKF40, custom
- CoolingWater: 1 GPM, 20 - 30°C, 71 PSI max (applicator requires exclusive water cooling supply at 0.50 GPM)
- Power Supply Generator Dimensions(7U rack) 19 x 12.2 x 20.03 inches (482.6 x 309.88 x 508.76 mm) (height x width x depth)
- Power Head Magnetron Head Dimensions9.85 x 9.85 x 16 inches (250.19 x 250.19 x 406.4 mm) (height x width x depth)
- Power Head Magnetron Head CoolingWater: 1 GPM, 20 - 30°C, 71 PSI max
- Regulation±3% of output power
- Total Gas Flow1 - 10 slm
- Remote ControlAnalog, RS485
Technical Specs
- TypeMicrowave Plasma System
- Power Output6.0 kW
- Frequency2,440 - 2,470 MHz
- Output Accuracy<1% closed loop control
- Ambient TemperatureUp to 40°C max
- Generator to Head DistanceUp to 100 feet max
- Microwave ConnectionsWR284F waveguide with CPR284F flanges
- Power Requirements200-208 VAC, 3 phase, 50/60 Hz
- Autotune<1.5 seconds with <2% reflected power
- ChemistriesO2, N2H2, N2, H2O, NH3, H2
- Applicator MaterialSapphire
- Operating Pressure1 - 10 Torr
- ComplianceCE
- ConfigurationKF40, custom
- CoolingWater: 1 GPM, 20 - 30°C, 71 PSI max (applicator requires exclusive water cooling supply at 0.50 GPM)
- Power Supply Generator Dimensions(7U rack) 19 x 12.2 x 20.03 inches (482.6 x 309.88 x 508.76 mm) (height x width x depth)
- Power Head Magnetron Head Dimensions9.85 x 9.85 x 16 inches (250.19 x 250.19 x 406.4 mm) (height x width x depth)
- Power Head Magnetron Head CoolingWater: 1 GPM, 20 - 30°C, 71 PSI max
- Regulation±3% of output power
- Total Gas Flow1 - 10 slm
- Remote ControlAnalog, RS485