KEINOS™ 2 MHz 5 kW, 11 kW & 13 kW RF Plasma Generators
KEINOS™ 2 MHz 5 kW, 11 kW & 13 kW RF Plasma Generators
The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.
- Dynamic frequency tuning reduces plasma stabilization time
- On-off, level to level and pulse shaping for maximum process flexibility
- Pulse energy control for process repeatability
- Pulse synchronization for pulse control in multi-frequency applications
- Up to 50 KHz pulse frequency for advanced process requirements
- Forward power accuracy of <±1.0% of set point See All Features
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | KEINOSRF Plasma Generator, 5, 11, or 13 kW, 2MHz, KEINOS |
Specifications
- TypeRF Plasma Generator
- Frequency1.985 MHz
- Frequency Tuning Range±10%
- Power Output5kW, 11kW, 13kW
- Accuracy±5W up to 500W
±1% from 501W to max power - Load Impedance RangeUnlimited
- Pulse FrequencyUp to 50KHz
- Pulse Rise Time<5 µsec
- Pulse Fall Time<5 µsec
- Minimum Pulse Width10 µsec
- Pulse Energy Repeatability<3%
- Hot Swap or Pulse on the FlyAvailable
- Pulse Between Two Set PointsAvailable
- Pulse EnabledVia internal or external TTL trigger, SMA
- Pulse ModeMaster or slave operation
- Input AC Power200/208VAC ±10%, 3 Phase, 50/60 Hz
- Rated Current25 amps max (5kW)
55 amps max (13kW) - RF ConnectorSQS standard (QC output)
- InterfaceEthernet, RS232
- Dimensions5 kW: 5.25 x 17.5 x 24.5 inches
11 kW & 13 kW: 8.30 x 17.8 x 25.5 inches (H x W x D) - ComplianceCE, SEMI S2, SEMI S7, SEMI S14, SEMI F47, CAN/CSA-C22.2 No. 61010-1
Features
Internal Scope
- High speed data collection with large memory buffer
- Real time statistics for field diagnosis
- Integrated high speed scope application to observe internal variables
- Customized presets for rapid customer setups and consistent data mining
- Control via Ethernet
View of Smith chart and corresponding time sequence
On/Off Pulsing Performance
- Sharp rectangular pulses with zero watts off state
- Used when fast rise times are needed
Multiple Level Pulsing Performance
- Sharp rectangular pulses with non zero off state
- Used for minimizing plasma impedance shifts
Pulse Shaping Performance
- Controlled ramping or controlled rise and fall time
- Used for reducing pulse overshoot and plasma instabilities
Resources
Drawings & CADs
KEINOS™ 2MHz Plasma Generator Dimensional Drawing(836.7 kB, PDF)
Literature
KEINOS™ RF Plasma Generator Datasheet(1.4 MB, PDF)
