AX2600 and AX2700 Microwave Plasma Subsystems

The AX2600 and AX2700 Microwave Plasma Delivery Subsystems are complete and highly reliable solutions for the cost-effective generation and safe delivery of atomic species to the wafer. Available in 3 kW, these highly reliable, field-proven plasma delivery subsystems deliver highly concentrated atomic species. Suitable for multiple chemistries, the high speed and precision of this plasma system’s automatic tuning guarantees immediate ignition and fast transition from plasma conditions for high productivity. Robust closed-loop control ensures high accuracy, precision, and optimal repeatability of the process from wafer to wafer and system to system.

3 kW Power
Accurate power measurement, closed loop control and automatic plasma tuning
Precise microwave generator with closed loop control power regulation
Delivers high productivity with fast tune times < 1 sec in various chemistries

See All Features

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		AX2600-AX2700Microwave Plasma Subsystem, 1.8 or 3.0 kW, 2440 - 2470 MHz, Automatic Tuning	UNIVERSAL

Specifications

Type
AX2600 & AX2700
Maximum Plasma Power Output
1.8 or 3.0 kW
Frequency
2440 - 2470 MHz
Output Accuracy
±1.5% (from 20 - 100% of max. power)
Power Requirements
200/208 VAC ±10%, 3 phase, 50/60 Hz
Chemistries
O2 , N2 , H2 O, Ar, NF3 , CF4 , C2 F6 , NH3

Applicator Material
Quartz, Sapphire
Operating Pressure
2 - 8 Torr
Communications
Analog, RS485, DeviceNet™ or EtherCAT®
Compliance
CE, ETL, SEMI S2-93A, SEMI F47
Time to Match
< 2 sec
Total Gas Flow
1 - 7 slm

Features

Flexibility

Microwave plasma sources, available for fluorine or non-fluorine chemistries, are designed for high power with multiple gases, flows and pressure ranges
Subsystems are lid mountable and configurable to accommodate available chamber real estate
Process changes are handled by the flexible system software and require no hardware modification
Quartz and Sapphire version to adapt multiple chemistries

Reliability

MKS microwave plasma subsystems are fully integrated and tested for true turnkey implementation
Components have been optimized for long life, reducing cost of ownership
Based on MKS's highly reliable, field proven technology, MTBF exceeds 100,000
Secure operations with analog control and remote only versions

AX2600 Series

The AX2600 Series is a fully integrated, “packaged” solution designed for easy on-chamber integration. The AX2600 system includes the AX2500 SmartPower® Microwave Generator, SmartMatch® Tuner, Isolator, and the patented AX7610 Microwave Applicator

AX2700 Series

The AX2700 Series, provided in kit form, consists of all components necessary for microwave plasma processing and is ideal for customers looking to optimize placement of the individual components on a system. All AX2700 system components are highly reliable, factory tested, and field-proven.