Rapid Vacuum Isolation Valves
Rapid Vacuum Isolation Valves
Rapid Vacuum Isolation Valves offer extremely fast closing speeds to protect the vacuum system during a backpressure event caused by pump failure. Many valves do not close fast enough to prevent particles and turbulence from moving upstream and damaging the process.
- NW16 - NW160
- Protects vacuum system from particles and turbulence during pump failure
- <50 to 600 msec closing time (depending on configuration) See All Features
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | RI-VALVEVacuum Isolation Valve, High Speed, Fast Closing |
Specifications
- TypeHigh Speed, Fast Closing Vacuum Valve
- Port SizeVarious, NW16 to NW160
- Closing Time<50 to 600 msec, depending on configuration
Features
Applications
In most applications, there are two isolation valves in the vacuum foreline; one near the chamber exit for process isolation and one directly upstream of the pump for preventative maintenance work.
The Rapid Isolation Valve can be triggered a number of ways, including:
-
Power to the pump - many pumps have accessory relays which can be easily tapped.
-
Programmable Automation Controller (PAC) or equivalent device providing logic.
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Pressure Sensors, based either on a threshold pressure or a rate-of-rise.
Resources
Application Notes
Eliminate Particle Contamination Caused by Pump Failure(1,014.3 kB, PDF)
