True in-process measurement is achieved with the T-Series by employing a single path optical design with the gas cell located between the infrared source and the spectrometer/detector. A variety of sample ports can be accommodated from compression fittings to KF flanges commonly used in semiconductor applications.

The T-Series is a versatile analyzer platform that can be factory configured to monitor or detect various IR active gases from near to mid-infrared at either parts per million capability or percent level sensitivities. With high measurement accuracy, selectivity and multi-component identification, the T-Series is the preferred solution over other spectroscopic techniques for Semiconductor, Specialty Gases and other Chemical process monitoring applications.