Configuration Options

Please see the Two-stage Soft Start Valve datasheet for available product options.

Description

V2

Vacuum Isolation Valve, 2-Stage, Soft Start, Bellows-sealed

Specifications

  • Type
    Two-stage Soft Start Bellows-sealed Isolation Valves
  • Vacuum Range
    Atmosphere to 1.0 x 10-9 Torr
  • Body Configuration
    Angle, Inline
  • Port Size
    NW25, NW40, NW50, NW80, NW100
  • Helium Leak Rate
    1.0 x 10-9 std cc/sec
  • Cylinder Volume
    0.25 in3 (4.1 cm3)
  • Limit Switch Rating
    5A - 250 VAC
  • Single Pole, Single Throw
    5A - 30 VDC
  • Blow-By Pressure
    Main: 30 - 60 psia, depending on configuration
    Bypass: 45 psia
  • Maximum Internal Spring Closing Pressure
    Main: 30 - 60 psia, depending on configuration
    Bypass: 40 psia
  • Maximum Bakeout Temperature
    150°C
  • Suggested Nominal Pressure Supply
    65 psig
  • Bypass Orifice
    0.225, 0.063, 0.125, 0.187 inches and custom configurations available

Features

Two-stage Valve Design

The Two-Stage Valve is specifically to accommodate space constraints and soft start the system in two steps. In the first stage, the bypass valve allows slow pumping from atmospheric pressure to a userspecified vacuum pressure. In the second stage, the main valve opens, allowing use of full pumping speed. The Two-Stage Valve features a removable small orifice within the bypass valve to vary slow pump speeds. A normally closed, pneumatically actuated valve at both stages, the TwoStage Valve is offered with an optional thumbscrew or micrometer head for the bypass valve. This allows for flow adjustment by limiting the stroke.

Valve Body Design

The body is made of high grade, corrosion resistant, 304 stainless steel using clean, tungsten inert gas (TIG) welding for significantly fewer entrapment areas, resulting in less contaminant build-up. A formed 321 stainless steel bellows, not edge-welded, prevents outgassing, virtual leaks, and particle entrapment between bellows convolutions and extends the valve’s cycle life. The bellows stroke length is optimized to ensure a longer cycle life while maintaining a high conductance. Elastomer seal choices include Viton® and Chemraz®, which has a higher chemical resistance. Vacuum exposed parts are clean and free of lubricants.

Applications

To achieve a soft pumpdown and isolate your vacuum system, MKS recommends its Two-Stage Valve. It integrates a small bypass valve into an isolation valve, significantly simplifying system setup and reducing costs.

The Two-Stage Valve is best suited for high vacuum applications, specifically semiconductor or optical processing for which a cleaner environment is necessary. With the integrated slow pumpdown feature, turbulent flow is diminished preventing contamination buildup and damage to your product.

Accessories

Replacement Solenoids

Compare Description Drawings, CAD & Specs Avail. Price
100008163Solenoid Valve, Replacement, 24 VDC, 7 Watt
$179
100008165Replacement Solenoid Valve, 120 VAC, 50-60 Hz, 7.5 Watt
$233
100008166Solenoid Valve, Replacement, 208 VAC, 50-60 Hz, 7.5 Watt
$153
100008167Solenoid Valve, Replacement, 220-240 VAC, 50-60 Hz, 7.5 Watt
$189
100008164Solenoid Valve, Replacement, 24 VAC, 50-60 Hz, 6 Watt
$221
100008539Solenoid Valve, Replacement, 12 VDC, 7 Watt
$111

Valve Seals

Compare Description Drawings, CAD & Specs Avail. Price
100004915Viton Seal Set, Two-Stage Vacuum Valves, NW25 Port
$39
100004909Viton Seal Set, Two-Stage Valves, NW80 Port
$57
100004913Viton Seal Set, Two-Stage Vacuum Valves, NW40 Port
$39
100004911Viton Seal Set, Two-Stage Valves, NW50 Port
$49
100004907Viton Seal Set, Two-Stage Vacuum Valves, NW100 Port
$39
100004910Chemraz Seal Set, Two-Stage Vacuum Valves, NW80 Port
$1,489
100004912Chemraz Seal Set, Two-Stage Vacuum Valves, NW50 Port
$1,186
100004916Chemraz Seal Set, Two-Stage Vacuum Valves, NW25 Port
$894
100004914Chemraz Seal Set, Two-Stage Vacuum Valves, NW40 Port
$1,043
100004908Chemraz Seal Set, Two-Stage Vacuum Valves, NW100 Port
$2,399

Limit Switches

Compare Description Drawings, CAD & Specs Avail. Price
100001520Limit Switch Kit, 150, 160, 2-stage, Pneumatic Valves, NW25 or NW40
$97
100001683Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW50 or NW63
$132
100001684Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW80
$132
100003663Limit Switch Kit, 150, 160, V-100, 2-stage Pneumatic Valves, NW100
$147

Internal Rebuild Kits

Compare Description Drawings, CAD & Specs Avail. Price
100004918Main Valve Rebuild Kit, Viton Seals, 2-stage Valve, NW25 Port
$987
100007131Main Valve Rebuild Kit with Viton Seal Set, 2-stage Valves, NW40
$431
100007132Main Valve Rebuild Kit with Viton Seal Set, 2-stage Valves, NW50
$613
100007133Main Valve Rebuild Kit with Viton Seal Set, 2-stage Valves, NW80
$935
100004917Main Valve Rebuild Kit, Viton Seals, 2-stage Valve, NW100 Port
$1,379
100004919Bypass Valve Spare Parts, Normally Closed, Viton Seals, Conversion Kit
$375
100004937Bypass Valve Rebuild Kit, Cv, IDA & Lopro 2-Stage Valves
$300
100004939Bypass Valve Rebuild Kit, Viton Seals, 2-stage, CV, IDA, LoPro 2-stage valves with Micrometer
$375
100004938Bypass Valve Rebuild Kit, Viton Seals, 2-stage and LoPro Two-stage valves with Thumbscrew
$357
100004921Bypass Valve Spare Parts, Micrometer, Viton Seals, Conversion Kit
$838
100004920Bypass Valve Spare Parts, Thumb Screw, Viton Seals, Conversion Kit
$448

Resources

Manuals

Literature

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