Technical Specs

  • Type
    Pressure Transducer
  • Sensor Type
    Capacitance Manometer
  • Measurement Type
    Differential
  • Full Scale Pressure Ranges
    0.2, 1, 2, 5, 10, 20, 50, 100, 200, and 1000 Torr and equivalents in kPa, mbar, inches H2O, and cm H2O
  • Analog Output
    0-1 VDC, 0-5 VDC, or 0-10 VDC > 10 kΩ load
  • Fitting Type
    Standard: 1/4 inch OD (6.4 mm) tubes
    Optional: Various
  • Electrical Connector
    15-pin high-density D-subminiature
  • Resolution
    0.01% of Full Scale
  • Accuracy
    0.50% of Full Scale unidirectional or bidirectional standard
    0.30% of Full Scale unidirectional or bidirectional
    0.30% of Reading (unidirectional only) optional
  • Zero Temperature Coefficient
    0.1% Full Scale/°C for standard accuracy specification
  • Span Temperature Coefficient
    0.04% of Reading/°C
  • Sensor Internal Volume
    Measurement Side (Px):1.4 cm
    Reference Side (Pr):9.0 cm
    (when equipped with standard 1/4-inch (6.4 mm) O.D. inlet and reference tubes)
  • Operating Temperature Range
    0° to 50°C
  • Maximum Overpressure
    Measurement Side (Px):120% of Full Scale or 20 psi (140 kPa), whichever is higher
    Reference Side (Pr):120% of Full Scale
  • Maximum Line Pressure
    40 psig (275 kPa)
  • Materials Exposed to Process Gases
    Measurement Side (Px):Inconel
    Reference Side (Pr):Inconel, ceramic, palladium, stainless steel, glass
  • Trip Points
    Two process pressure trip points, independently adjustable from -100% to +100% of Full Scale
  • Trip Relays
    DPDT contacts rated at 1.0 amps at 30 VDC or 0.3 amps at 120 VAC
  • Power Requirements
    ±15VDC (±5%) or +16 to +30VDC @ 75 mA, ripple less than 20 mV
  • Compliance
    CE, SEMI S2

Technical Specs

  • Type
    Pressure Transducer
  • Sensor Type
    Capacitance Manometer
  • Measurement Type
    Differential
  • Full Scale Pressure Ranges
    0.2, 1, 2, 5, 10, 20, 50, 100, 200, and 1000 Torr and equivalents in kPa, mbar, inches H2O, and cm H2O
  • Analog Output
    0-1 VDC, 0-5 VDC, or 0-10 VDC > 10 kΩ load
  • Fitting Type
    Standard: 1/4 inch OD (6.4 mm) tubes
    Optional: Various
  • Electrical Connector
    15-pin high-density D-subminiature
  • Resolution
    0.01% of Full Scale
  • Accuracy
    0.50% of Full Scale unidirectional or bidirectional standard
    0.30% of Full Scale unidirectional or bidirectional
    0.30% of Reading (unidirectional only) optional
  • Zero Temperature Coefficient
    0.1% Full Scale/°C for standard accuracy specification
  • Span Temperature Coefficient
    0.04% of Reading/°C
  • Sensor Internal Volume
    Measurement Side (Px):1.4 cm
    Reference Side (Pr):9.0 cm
    (when equipped with standard 1/4-inch (6.4 mm) O.D. inlet and reference tubes)
  • Operating Temperature Range
    0° to 50°C
  • Maximum Overpressure
    Measurement Side (Px):120% of Full Scale or 20 psi (140 kPa), whichever is higher
    Reference Side (Pr):120% of Full Scale
  • Maximum Line Pressure
    40 psig (275 kPa)
  • Materials Exposed to Process Gases
    Measurement Side (Px):Inconel
    Reference Side (Pr):Inconel, ceramic, palladium, stainless steel, glass
  • Trip Points
    Two process pressure trip points, independently adjustable from -100% to +100% of Full Scale
  • Trip Relays
    DPDT contacts rated at 1.0 amps at 30 VDC or 0.3 amps at 120 VAC
  • Power Requirements
    ±15VDC (±5%) or +16 to +30VDC @ 75 mA, ripple less than 20 mV
  • Compliance
    CE, SEMI S2

Need help?

Contact an Applications Specialist by sending us an email