300 mm Resist-Torr® XD High Sensitivity Photoresist Detection Monitor
Model: 300-mm-resist-torr-xd-residual-gas-analyzer
300 mm Resist-Torr® XD High Sensitivity Photoresist Detection Monitor
Model: 300-mm-resist-torr-xd-residual-gas-analyzer
Technical Specs
Mass Range
1-200 amu
Ion Source
High sensitivity, closed ion source
Filaments
Replaceable twin Thoria filaments
Mass Filter
Double filter (1 inch "RF only" pre-filter with 4 inch main filter)
Detector
Dual (Faraday and Secondary Electron Multiplier)
Minimum Detectable Concentration
<15ppb specified with Argon or Nitrogen
Mass Stability
Better than ±0.1 amu over 8 hours
Resolution
Better than 10% valley between peaks of equal height throughout the mass range
Mounting Flange
2.75 inch Conflat® flange, SS capillary
Vacuum Hardware
60 l/s turbomolecular pump with high conductance analyzer housing, fast response capillary inlet system, automated vacuum controller (RVC) completely interlocked and integrated
Analyzer Housing Base Pressure
Better than 5x10-9 Torr after bakeout
Bakeout Temperature and Bakeout Jacket
Included for 200°C bakeout
Operating Temperature
Electronics: 10-40°C
Pneumatics
60-80 psig CDA
Power Requirements
88-264 VAC, 47/63 Hz, 600 Watts
Maximum Operating Conditions
80% RH (non condensing)
LED Status Indication
Interlock status, filament emission, SEM, power and communications
I/O Capability
4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
Other Facilities
Leak check headset socket, external filament trip socket, instrument reset
Software
Process Eye Professional fully network compatible control platform generating under 32bit or 64bit Microsoft® Windows® xP, Vista, Server 2008 or Windows 7 (recommended)
Communication
Ethernet CAT-5e
PC Requirements
Intel® Pentium IV® or AMD Athlon xP 1.2GHz, 1GB RAM, 120 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use. Multi-sensor installation may require higher specifications.
Simultaneous Multi-Sensor
Process Eye Professional client/server configuration offers flexible multi-sensor operation.
RGA to Vacuum System Cable Length
33 feet (10 m)
Shipping Weight
85 pounds (38.5 kg)
Foreline Pump
Dry diaphragm standard
Inlet
Dual path with fast-response capillary for degas monitoring and high conductance for base vacuum. Includes heater jacket.
Compliance
Compliant to RoHS Directive 2002/95/EC (control unit)
Technical Specs
Mass Range
1-200 amu
Ion Source
High sensitivity, closed ion source
Filaments
Replaceable twin Thoria filaments
Mass Filter
Double filter (1 inch "RF only" pre-filter with 4 inch main filter)
Detector
Dual (Faraday and Secondary Electron Multiplier)
Minimum Detectable Concentration
<15ppb specified with Argon or Nitrogen
Mass Stability
Better than ±0.1 amu over 8 hours
Resolution
Better than 10% valley between peaks of equal height throughout the mass range
Mounting Flange
2.75 inch Conflat® flange, SS capillary
Vacuum Hardware
60 l/s turbomolecular pump with high conductance analyzer housing, fast response capillary inlet system, automated vacuum controller (RVC) completely interlocked and integrated
Analyzer Housing Base Pressure
Better than 5x10-9 Torr after bakeout
Bakeout Temperature and Bakeout Jacket
Included for 200°C bakeout
Operating Temperature
Electronics: 10-40°C
Pneumatics
60-80 psig CDA
Power Requirements
88-264 VAC, 47/63 Hz, 600 Watts
Maximum Operating Conditions
80% RH (non condensing)
LED Status Indication
Interlock status, filament emission, SEM, power and communications
I/O Capability
4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
Other Facilities
Leak check headset socket, external filament trip socket, instrument reset
Software
Process Eye Professional fully network compatible control platform generating under 32bit or 64bit Microsoft® Windows® xP, Vista, Server 2008 or Windows 7 (recommended)
Communication
Ethernet CAT-5e
PC Requirements
Intel® Pentium IV® or AMD Athlon xP 1.2GHz, 1GB RAM, 120 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use. Multi-sensor installation may require higher specifications.
Simultaneous Multi-Sensor
Process Eye Professional client/server configuration offers flexible multi-sensor operation.
RGA to Vacuum System Cable Length
33 feet (10 m)
Shipping Weight
85 pounds (38.5 kg)
Foreline Pump
Dry diaphragm standard
Inlet
Dual path with fast-response capillary for degas monitoring and high conductance for base vacuum. Includes heater jacket.
Compliance
Compliant to RoHS Directive 2002/95/EC (control unit)
Resources & Downloads
Drawings & CADs
Literature