Metal Etch Process Trap Accessories
Model: 4620-0103
Metal Etch Process Trap Accessories
Model: 4620-0103

Overview
Overview
The 4620-0103 Entry Port Heater is designed for metal etch traps with a NW50 size entry port. The heater is 3 inches in length and operates at 120 VAC. Metal etch process traps operate most efficiently when they are installed in the foreline between the turbo pump and the dry pump with a line pressure above 100 mTorr. The Metal Etch Trap operates in conjunction with a heated foreline operating at 105°C which prevents condensation of the exhaust byproducts. The heating of this line must be very uniform, with no cold spots.
Technical Specs
- TypeEntry Port Heater
- Port SizeNW50
- For Use WithMetal Etch Trap
Technical Specs
- TypeEntry Port Heater
- Port SizeNW50
- For Use WithMetal Etch Trap
