649 Pressure Controller with Capacitance Manometer and Mass Flow Meter

10, 20, 50, 100, 1000 mmHg (Torr) Full Scale

50, 200, 1000, 5000 sccm (nominal Full Scale flow rates for N2 with 15 psig on inlet and atmospheric pressure on outlet)

10, 20, 50, 100, 200, 500, 1000, 2000, 5000 sccm (Full Scale)

Pressure: Two open-collector transistors
Rated: 250 mA @ 30 VDC
Adjustable: 1 to 100% of Full Scale
Hysteresis: 3% of Full Scale
Indicators: Green LEDs on when actuated

±0.2% of Full Scale

45 psia or 2x Full Scale, whichever is greater

150 psi (consistent with transducer overpressure limit)

Downstream

±0.5% of Reading (includes linearity, hysteresis, and repeatability)

±0.04% of Full Scale/°C

±0.04% of Reading/°C

2 to 100% of Full Scale

1.0 sec (excluding system time constant)

0 to 50°C (32 to 122°F)

-20 to 80°C (-4 to 176°F)

1% to 100% of Full Scale

±0.2% of Full Scale

0.1% of Full Scale

±1.0% of Full Scale (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)

< 0.08% of Reading/°C

< 0.05% of Full Scale/°C

<0.02% of Reading/psi

±15 VDC ±5%, 300 mA max.

15-pin male Type “D"

<100 msec

<2 min (within 0.2% of Full Scale steady state)

SAMA 33.1, 1-abc: <0.2% of Full Scale

Pressure: 0-10 VDC default (user settable to 0-5 VDC)

100 ft. (30 m) max.

CE