910 DualTrans™ MicroPirani™ - Absolute Piezo Vacuum Transducers

Model: 910-micro-pirani-vacuum-transducer

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Absolute Measurement Range
1.0 x 10^-5 to 1,500 Torr
Digital Communication
RS485/RS232 (4800-230400 Baud)
Sensor
Type 1: MicroPirani (MEMS Thermal Conductivity)
Type 2: Piezo Absolute (MEMS Diaphragm)
Relays
3 relays SPDT (optional)
Installation Orientation
Any
Set Point Range
Absolute: 5.0 x 10^-4 to 1,500 Torr
Calibration Gas
Air, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, xenon, Neon
Operating Temperature
0- 40°C (32-104°F)
Maximum Bakeout Temperature
85°C (185°F), non-operating
Digital Controls
Zero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test
Digital Status
Pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
Analog Output
1-9.2 VDC, 1 VDC/decade, 100Ω maximum output impedance (absolute pressure)
Analog Output Resolution
16 bit

Relay Contact Rating
1 A @ 30VAC/DC, resistive
Relay Response
100 msec maximum
Power Requirements
9-30 VDC, 150 ma, < 1.2 watts maximum
Accuracy
5 x 10^-4 to 1 x 10^-3 Torr ±10% of reading
1 x 10^-3 to 11 Torr ±5% of reading
11 to 1000 Torr ±0.75% of reading
Repeatability
5 x 10^-4 to 10^-3 Torr ±8% of reading
10^-3 Torr to 11 Torr ±2% of reading
11 to 1000 Torr ±0.2% of reading
Overpressure Limit
2250 Torr (absolute)
Internal Volume
2.8 cc (KF16)
Exposed Materials
Silicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton®
Electronic Casing and Flange
304 stainless steel
Weight
170 g (with KF 16 Flange)
Compliance
CE

Absolute Measurement Range
1.0 x 10^-5 to 1,500 Torr
Digital Communication
RS485/RS232 (4800-230400 Baud)
Sensor
Type 1: MicroPirani (MEMS Thermal Conductivity)
Type 2: Piezo Absolute (MEMS Diaphragm)
Relays
3 relays SPDT (optional)
Installation Orientation
Any
Set Point Range
Absolute: 5.0 x 10^-4 to 1,500 Torr
Calibration Gas
Air, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, xenon, Neon
Operating Temperature
0- 40°C (32-104°F)
Maximum Bakeout Temperature
85°C (185°F), non-operating
Digital Controls
Zero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test
Digital Status
Pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
Analog Output
1-9.2 VDC, 1 VDC/decade, 100Ω maximum output impedance (absolute pressure)
Analog Output Resolution
16 bit

Relay Contact Rating
1 A @ 30VAC/DC, resistive
Relay Response
100 msec maximum
Power Requirements
9-30 VDC, 150 ma, < 1.2 watts maximum
Accuracy
5 x 10^-4 to 1 x 10^-3 Torr ±10% of reading
1 x 10^-3 to 11 Torr ±5% of reading
11 to 1000 Torr ±0.75% of reading
Repeatability
5 x 10^-4 to 10^-3 Torr ±8% of reading
10^-3 Torr to 11 Torr ±2% of reading
11 to 1000 Torr ±0.2% of reading
Overpressure Limit
2250 Torr (absolute)
Internal Volume
2.8 cc (KF16)
Exposed Materials
Silicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton®
Electronic Casing and Flange
304 stainless steel
Weight
170 g (with KF 16 Flange)
Compliance
CE

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