974B QuadMag™ Cold Cathode - MicroPirani™ - Piezo Vacuum Transducers
Model: 974B-22034
974B QuadMag™ Cold Cathode - MicroPirani™ - Piezo Vacuum Transducers
Model: 974B-22034

Overview
Overview
The 974B-22034 QuadMag Cold Cathode / MicroPirani / Piezo Transducer offers a measurement range from 1x10-8 to 1500 Torr and features a size NW25 ISO-KF flange fitting. It has an RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. Three included mechanical relays can be used for process control like interlocking valves or pumps. The 974B QuadMag has been specifically designed for pressure measurement within a vacuum loadlock. It has the capability to replace multiple pressure measurement devices on a loadlock with its absolute pressure measurement from atmosphere to 10-8 Torr and atmospheric switching capabilities. Subsequently, OEM’s can reduce costs with a simplified loadlock design. The 974B can be used on loadlocks or any vacuum chamber requiring both absolute pressure measurement and atmospheric switching capabilities. All Series 970B transducers have an analog pressure output of 0.5VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. The Series 970B have standard 15 pin HD Sub-D connector. It can also emulate analog voltage outputs from a variety of other vacuum transducers. The emulation feature can be used to upgrade and replace other vendors’ gauges in OEM applications without changing system software. The integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed pressure reading from individual sensors or combined reading can be seen from >5 meters away on the high contrast display.
Technical Specs
- Absolute Measurement Range1.0 x 10-8 to 1500 Torr
- Differential Measurement Range-760 to +760 Torr
- Digital CommunicationRS485
- TypeVacuum Transducer
- SensorCold Cathode,MicroPirani™ (MEMS Thermal Conductivity) and Piezo Differential (MEMS Diaphragm)
- DisplayTouch-screen
- Seal MaterialViton
- EnclosureStandard
- Electrical Connector15-pin, High Density, D-sub male
- InterfaceRS485/analog
- Relays3
- Fitting TypeNW25 ISO-KF
- Installation OrientationAny
- Set Point RangeAbsolute: 1 x 10-8 Torr to 1000 Torr, Differential: -760 to +100 Torr
- Calibration GasNitrogen
- Operating Temperature0 - 40°C (32 - 104°F)
- Maximum Bakeout Temperature85°C (185°F)
- Digital ControlsPressure units, baud rate, address, factory default, user tag, RS485 test, gas correction, set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
- Digital StatusPressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
- Analog Output0.5 VDC per Decade
- Relay Contact Rating1 A @ 30VAC/DC, resistive
- Power Requirements9 - 30 VDC, 2 Watts
- AccuracyAbsolute: 5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 50 Torr ±5% of Reading, 50 to 1000 Torr ±1% of Reading, Differential: -10 to +10 Torr ±10% of Reading, -100 to -10 Torr ±8% of Reading, -760 to -100 Torr ±1% of Reading, +10 to 100 Torr ±5% of Reading
- RepeatabilityAbsolute: 5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 50 ±2% of Reading, 50 to 1000 Torr ±1% of Reading, Differential: -760 to +10 Torr ±1% of Reading
- Overpressure Limit1500 Torr
- Internal Volume21 cm3
- Electronic Casing and Flange304 stainless steel
- ComplianceCE
- Zero Stability±0.1% of Full Scale (Full Scale = 760 Torr) (typical) Differential
Technical Specs
- Absolute Measurement Range1.0 x 10-8 to 1500 Torr
- Differential Measurement Range-760 to +760 Torr
- Digital CommunicationRS485
- TypeVacuum Transducer
- SensorCold Cathode,MicroPirani™ (MEMS Thermal Conductivity) and Piezo Differential (MEMS Diaphragm)
- DisplayTouch-screen
- Seal MaterialViton
- EnclosureStandard
- Electrical Connector15-pin, High Density, D-sub male
- InterfaceRS485/analog
- Relays3
- Fitting TypeNW25 ISO-KF
- Installation OrientationAny
- Set Point RangeAbsolute: 1 x 10-8 Torr to 1000 Torr, Differential: -760 to +100 Torr
- Calibration GasNitrogen
- Operating Temperature0 - 40°C (32 - 104°F)
- Maximum Bakeout Temperature85°C (185°F)
- Digital ControlsPressure units, baud rate, address, factory default, user tag, RS485 test, gas correction, set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
- Digital StatusPressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
- Analog Output0.5 VDC per Decade
- Relay Contact Rating1 A @ 30VAC/DC, resistive
- Power Requirements9 - 30 VDC, 2 Watts
- AccuracyAbsolute: 5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 50 Torr ±5% of Reading, 50 to 1000 Torr ±1% of Reading, Differential: -10 to +10 Torr ±10% of Reading, -100 to -10 Torr ±8% of Reading, -760 to -100 Torr ±1% of Reading, +10 to 100 Torr ±5% of Reading
- RepeatabilityAbsolute: 5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 50 ±2% of Reading, 50 to 1000 Torr ±1% of Reading, Differential: -760 to +10 Torr ±1% of Reading
- Overpressure Limit1500 Torr
- Internal Volume21 cm3
- Electronic Casing and Flange304 stainless steel
- ComplianceCE
- Zero Stability±0.1% of Full Scale (Full Scale = 760 Torr) (typical) Differential
Resources & Downloads
Literature
970 Cold Cathode Transducers(250.9 kB, PDF)
Drawings & CADs
974 QuadMag™ Vacuum Transducer Dimensional Drawing(253.5 kB, PDF)
