AX8555 Stand-Alone Low Flow Ozone Delivery System
Model: AX8555
AX8555 Stand-Alone Low Flow Ozone Delivery System
Model: AX8555
Overview
Overview
The AX8555 Stand-Alone Low Flow Ozone Delivery System supports multiple chambers or tools to provide ultra clean ozone gas. The AX8555 is a fully integrated, lower flow ozone gas delivery system specifically designed for advanced semiconductor process applications such as Atomic Layer Deposition (ALD).
Technical Specs
- TypeOzone Gas Delivery System
- Ozone Output26 - 180 g/hr per channel
- Flow Rate0.5 - 5 slm per channel
- Feed GasOxygen, Nitrogen (20 - 100 ppm of total flow), Carbon Dioxide (1000 - 2000 ppm of total flow)
- Feed Gas Supply Pressure60 psig (4.2 kg/cm2) nominal, 75 psig (5.3 kg/cm2) maximum, N2/CO2 pressure 10 psi higher than O2 pressure
- Feed Gas Purity99.9995% minimum
- Operating Temperature41 - 104°F (5 - 40°C)
- Cooling Water Temperature Required63 - 73°F (17 - 23°C)
- Cooling Water Filtration Required20µm
- Cooling Water Quality RequiredDemineralized
- Cooling Water Minimum Flow Required1.0 gpm (2.3 - 3.8 slm) minimum to 1.6 gpm max. per channel (depending on configuration)
- Cooling Water Connections Required1/2 in. compression (Swagelok®)
- Cooling Water Flow Control/Indication RequiredVariable - area flow meter with valve
- Cooling Water Pressure Indication RequiredInlet pressure gauge
- Voltage Requirements208 volts AC (±10%), three phase
- Current Requirements15 Amps RMS, 30 Amps service, 31 Amps RMS, 50 amps service (depending on configuration) minimum of 10,000 A.I.C.
- Frequency50/60 Hz
- Pressure IndicationInlet pressure gauge for each gas
- Exhaust Flow Rate150 cfm (70.8 l/s)
- Exhaust TypeSEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
- Exhaust Static Pressure0.10 in. (2.54 mm) H2O minimum measured at the bottom of the duct flange adapter on cabinet
- Control Air Pressure70 - 100 psig
- Control Air TypeCDA or dry nitrogen, 40µm filtered
- Control Air Fitting1/4 in. compression (Swagelok®)
- Exhaust Connection6 - in. diameter duct opening
- Dimensions24 x 75 x 36 in. (610 x 1575 x 914 mm) (width x height x depth)
- Relative Humidity30 - 90% (non - condensing)
- Weight600 lbs.(272 kg) for system with one generator,880 lbs.(400 kg) for system with four generators
- ComplianceCE, S2 - 0302, F47
- AltitudeUp to 3280 ft. (1000 m) above mean sea level
Technical Specs
- TypeOzone Gas Delivery System
- Ozone Output26 - 180 g/hr per channel
- Flow Rate0.5 - 5 slm per channel
- Feed GasOxygen, Nitrogen (20 - 100 ppm of total flow), Carbon Dioxide (1000 - 2000 ppm of total flow)
- Feed Gas Supply Pressure60 psig (4.2 kg/cm2) nominal, 75 psig (5.3 kg/cm2) maximum, N2/CO2 pressure 10 psi higher than O2 pressure
- Feed Gas Purity99.9995% minimum
- Operating Temperature41 - 104°F (5 - 40°C)
- Cooling Water Temperature Required63 - 73°F (17 - 23°C)
- Cooling Water Filtration Required20µm
- Cooling Water Quality RequiredDemineralized
- Cooling Water Minimum Flow Required1.0 gpm (2.3 - 3.8 slm) minimum to 1.6 gpm max. per channel (depending on configuration)
- Cooling Water Connections Required1/2 in. compression (Swagelok®)
- Cooling Water Flow Control/Indication RequiredVariable - area flow meter with valve
- Cooling Water Pressure Indication RequiredInlet pressure gauge
- Voltage Requirements208 volts AC (±10%), three phase
- Current Requirements15 Amps RMS, 30 Amps service, 31 Amps RMS, 50 amps service (depending on configuration) minimum of 10,000 A.I.C.
- Frequency50/60 Hz
- Pressure IndicationInlet pressure gauge for each gas
- Exhaust Flow Rate150 cfm (70.8 l/s)
- Exhaust TypeSEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
- Exhaust Static Pressure0.10 in. (2.54 mm) H2O minimum measured at the bottom of the duct flange adapter on cabinet
- Control Air Pressure70 - 100 psig
- Control Air TypeCDA or dry nitrogen, 40µm filtered
- Control Air Fitting1/4 in. compression (Swagelok®)
- Exhaust Connection6 - in. diameter duct opening
- Dimensions24 x 75 x 36 in. (610 x 1575 x 914 mm) (width x height x depth)
- Relative Humidity30 - 90% (non - condensing)
- Weight600 lbs.(272 kg) for system with one generator,880 lbs.(400 kg) for system with four generators
- ComplianceCE, S2 - 0302, F47
- AltitudeUp to 3280 ft. (1000 m) above mean sea level
Resources & Downloads
Drawings & CADs
AX8555 Ozone Delivery System Dimensions(113.4 kB, PDF)