AX8575 Stand-Alone High Flow, High Concentration Ozone Delivery System
Model: AX8575
AX8575 Stand-Alone High Flow, High Concentration Ozone Delivery System
Model: AX8575
Overview
Overview
The AX8575 stand-alone ozone gas delivery system is designed to provide high flow, high concentration, ultra clean ozone generation and delivery. This unit has the highest flexibility to meet the ever changing needs of the semiconductor industry. The AX8575 is a fully integrated, high output ozone gas delivery system that can be configured as a multi-channel system delivering ozone for up to 4 channels supporting multiple chambers or multiple tools. The AX8575 is available with an in-rack chiller option for high concentrations. Flow rates of up to 40 slm and concentrations up to 350g/Nm3 can be achieved depending on the configuration of the system.
Technical Specs
- TypeOzone Gas Delivery System
- Ozone Output350g/Nm3
- Flow Rate40 slm
- Feed GasOxygen, Nitrogen (20 - 100 ppm of total flow)
- Feed Gas Supply Pressure50 psig (3.5 kg/cm2) nominal, 60 psig (4.2 kg/cm2) maximum, N2 pressure 10 psi higher than O2 pressure
- Feed Gas Purity99.9995% minimum
- Operating Temperature41 - 104°F (5 - 40°C)
- Cooling Water Temperature Required12 - 21°C with chiller, 5 - 17°C without chiller
- Cooling Water Filtration Required100 micron Filtration PWC (with chiller)
- Cooling Water Quality Required1 - 3 MOhm DI, Note: Max DI water/Glycol blend: 70/30
- Cooling Water Minimum Flow Required10 gpm nominal (water modulating valve range: 2 - 10 gpm) with chiller, 2.5 gpm per Generator (configuration dependant) without chiller
- Cooling Water Connections Required1 in. compression (Swagelok®)
- Cooling Water Heat Load Required10 kw (based on two generator configuration) with chiller, 5 kw per generator without chiller
- Voltage Requirements208 volts AC (±10%), three phase
- Current Requirements31 Amps RMS, 50 Amps service (depending on configuration) minimum of 10,000 A.I.C, 60 Amps service with chiller
- Frequency50/60 Hz
- Exhaust Flow Rate150 cfm (70.8 l/s)
- Exhaust TypeSEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
- Exhaust Static Pressure0.10 in. (2.54 mm) H2O minimum, measured at the bottom of the duct flange adapter on cabinet
- Control Air Pressure70 - 100 psig
- Control Air TypeCDA or dry nitrogen, 40µm filtered
- Control Air Fitting1/4 in. compression (Swagelok®)
- Exhaust Connection6 in. diameter duct opening or 4 in. diameter duct opening
- Dimensions24 x 75 x 36 in. (610 mm x 1575 mm x 914 mm) (width x height x depth)
- Relative Humidity30 - 90% (non - condensing)
- Weight600 lbs.(272 kg) for system with one generator, 880 lbs.(400 kg) for system with four generators, 1100 lbs. (499 kg) for system with two generators and internal chiller
- ComplianceCE, S2 - 0302, F47
- AltitudeUp to 3280 feet (1000 m) above mean sea level
Technical Specs
- TypeOzone Gas Delivery System
- Ozone Output350g/Nm3
- Flow Rate40 slm
- Feed GasOxygen, Nitrogen (20 - 100 ppm of total flow)
- Feed Gas Supply Pressure50 psig (3.5 kg/cm2) nominal, 60 psig (4.2 kg/cm2) maximum, N2 pressure 10 psi higher than O2 pressure
- Feed Gas Purity99.9995% minimum
- Operating Temperature41 - 104°F (5 - 40°C)
- Cooling Water Temperature Required12 - 21°C with chiller, 5 - 17°C without chiller
- Cooling Water Filtration Required100 micron Filtration PWC (with chiller)
- Cooling Water Quality Required1 - 3 MOhm DI, Note: Max DI water/Glycol blend: 70/30
- Cooling Water Minimum Flow Required10 gpm nominal (water modulating valve range: 2 - 10 gpm) with chiller, 2.5 gpm per Generator (configuration dependant) without chiller
- Cooling Water Connections Required1 in. compression (Swagelok®)
- Cooling Water Heat Load Required10 kw (based on two generator configuration) with chiller, 5 kw per generator without chiller
- Voltage Requirements208 volts AC (±10%), three phase
- Current Requirements31 Amps RMS, 50 Amps service (depending on configuration) minimum of 10,000 A.I.C, 60 Amps service with chiller
- Frequency50/60 Hz
- Exhaust Flow Rate150 cfm (70.8 l/s)
- Exhaust TypeSEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
- Exhaust Static Pressure0.10 in. (2.54 mm) H2O minimum, measured at the bottom of the duct flange adapter on cabinet
- Control Air Pressure70 - 100 psig
- Control Air TypeCDA or dry nitrogen, 40µm filtered
- Control Air Fitting1/4 in. compression (Swagelok®)
- Exhaust Connection6 in. diameter duct opening or 4 in. diameter duct opening
- Dimensions24 x 75 x 36 in. (610 mm x 1575 mm x 914 mm) (width x height x depth)
- Relative Humidity30 - 90% (non - condensing)
- Weight600 lbs.(272 kg) for system with one generator, 880 lbs.(400 kg) for system with four generators, 1100 lbs. (499 kg) for system with two generators and internal chiller
- ComplianceCE, S2 - 0302, F47
- AltitudeUp to 3280 feet (1000 m) above mean sea level