DA07A 1-1000 Torr Heated & Unheated Baratron® Capacitance Manometers with EtherCAT®
DA07A 1-1000 Torr Heated & Unheated Baratron® Capacitance Manometers with EtherCAT®
The DA07A builds off the same Inconel® sensor as the industry and process proven MKS 600 Series and DA02 Baratron Capacitance Manometer, resulting in long life, low maintenance, exceptional corrosion resistance, and high maximum overpressure limit. The manometer is equipped with a 1 ms EtherCAT® communication refresh rate, 12 ms nominal pressure response time, extensive use of automotive grade electronics, and an extended maximum ambient operating temperature of 60°C. The advanced electronics in the DA07A also provides an improved signal to noise ratio and faster response time than the industry-standard DA02. Further, the resolution and response of both the analog and digital pressure signal can be user optimized for specific applications through adjustment of the programmable filter setting.
Available with the standard MKS sensor or optional proprietary etch/fluorine/deposition friendly sensor for enhanced stability and reduced process induced zero drift in critical etch or deposition applications.
See the DA05A for Full Scale pressures less than 1 Torr/mbar.
- 1 ms EtherCAT refresh rate
- 12 ms pressure signal response time (typical)
- Options for unheated and heated to 45°C, 80°C, or 100°C
- Standard MKS sensor or etch/fluorine/deposition friendly sensor option available
- Meets current ETG Semiconductor Technical Working Group profiles See All Features
Configuration Options
The following options are available for DA07A Baratron® Capacitance Manometers
Ordering Code Example: DA07A01TCES24BAA0V0
| Configuration Option | Option Code |
|---|---|
| DA07A Heated Capacitance Manometers | DA07A |
Full Scale Range |
|
| 1 Torr or mbar | 01 |
| 2 Torr or mbar | 02 |
| 10 Torr or mbar | 11 |
| 20 Torr or mbar | 21 |
| 100 Torr or mbar | 12 |
| 200 Torr or mbar | 22 |
| 500 Torr or mbar | 52 |
| 1000 Torr or mbar | 13 |
Units of Measurement |
|
| Torr absolute | T |
| mbar absolute | M |
Fittings |
|
| 0.5 in. OD tube | BA |
| 8 VCR (compatible) female | CE |
| 8 VCR (compatible) male | CF |
| 8 VCR (compatible) female, short tube (use with sensor type T or M) | CR |
| NW16 ISO-KF | GA |
| 1.33 in. OD CF (rotatable) | HA |
Sensor Type |
|
| Standard sensor, standard inlet tube length | S |
| Standard sensor, reduced inlet tube length (use with fitting code CR) | T |
| Deposition/etch/fluorine friendly sensor | L |
| Short tube deposition/etch/fluorine friendly sensor (use with fitting code CR) | M |
Input/Output Voltages |
|
| ±15 VDC input, 0-10 VDC analog output | 2 |
| 24 VDC input, 0-10 VDC analog output | 3 |
Sensor Temperature |
|
| Unheated | 0 |
| 45°C | 4 |
| 80°C | 8 |
| 100°C | 1 |
Electrical Connector |
|
| 15-pin D-subminiature male connector with screw lock | B |
| 15-pin D-subminiature male connector with slide lock | P |
Trip Points |
|
| None | 00 |
| Trip A above 50%, Trip B above 50% of Full Scale Range | AA |
| Trip A above 50%, Trip B below 50% of Full Scale Range | AB |
| Trip A below 50%, Trip B below 50% of Full Scale Range | BB |
| Trip A below 50%, Trip B above 50% of Full Scale Range | BA |
Reserved |
|
| Reserved | 0 |
Calibration |
|
| Full Scale > 1 Torr | 0 |
| Vertical (Full Scale ≤ 1 Torr Only) | V |
| Horizontal (Full Scale ≤ 1 Torr Only) | H |
Accuracy |
|
| Standard accuracy | 0 |
| Notes: Units with trip points have default setpoints and actuation direction based on the part number code but are user adjustable through EtherCAT. Custom part numbers can be requested for copy exact applications. Standard part numbers will ship with the latest firmware at the date of manufacture. A custom part number should be requested for locked firmware/EtherCAT ESI file. |
|
Specifications
- TypeVacuum/pressure Transducer
- Measurement TypeAbsolute
- Sensor TemperatureUnheated or Controlled to 45°C, 80°C, or 100°C
- Full Scale Pressure Ranges1, 2, 10, 20, 100, 200, 500, 1000 Torr or mbar
- AccuracyUnheated: 0.25% of Reading
45°C: 0.10% of Reading
80°C & 100°C: 0.25% of Reading
Includes non-linearity, hysteresis, and non-repeatability.
Accuracy specification and NIST-traceable calibration points included on calibration sheet are from Full Scale to 10% of Full Scale. - Resolution0.001% Full Scale
Theoretical resolution under ideal laboratory conditions. Actual resolution in service is usually determined by system design factors not under MKS’s control. - Response TimePressure: 12 ms nominal (10-90% of a step response) influenced by step size and digital pressure filter setting
EtherCAT Update Rate: Refresh Rate 1 ms - Fitting Type0.5 in. OD tube
8 VCR (compatible) female
8 VCR (compatible) male
8 VCR (compatible) female, short tube
NW16 ISO-KF
1.33 in. OD CF (rotatable) - Output SignalAnalog: 0-10 VDC into >10 kΩ load
Digital: EtherCAT - Electrical ConnectorAnalog: 15-pin D-subminiature male
EtherCAT: Two (2) RJ45 female receptacles for incoming and network signals
- Zero Temperature CoefficientUnheated:
0.015% Full Scale/°C for 1 Torr
0.010% Full Scale/°C for 2 Torr
0.005% Full Scale/°C for 10-1000 Torr
Heated:
0.002% Full Scale/°C - Span Temperature CoefficientUnheated: 0.04% Reading/°C
Heated: 0.02% Reading/°C - Volume6.3 cm3 for 0.5 in. OD tube fitting. Volumes with other fitting available on request
- Warm-up Time2 hours nominal (1 hour stabilization timer for unheated)
- Overpressure Limit45 psia (310 kPa)
- Materials Exposed to Process GasesInconel and Incoloy nickel alloys (Fittings are made from 300 series stainless steel)
- Power RequirementsUnheated:
+24 VDC ±10% @ 150 mA
±15 VDC @ 180 mA
45°C:
+24 VDC ±10% @ 560 mA
±15 VDC @ 480 mA
80°C & 100°C:
+24 VDC ±10% @ 800 mA
±15 VDC @ 700 mA - Output RelaysStandard:
Two solid state relays for "sensor ready" and "device fault" status.
Optional:
Two optional internally mounted process pressure trip relays, solid state, independently adjustable through EtherCAT by customer at atmospheric pressure from 0.5% to 100% of Full Scale range.
Relay hysteresis default setting of 0.5% of Full Scale and is adjustable through EtherCAT.
Relay capacity of 0.375 amps @ 30 VDC. Relay complies with UL1577 requirements. - IndicatorsMulticolor status LED and two (2) red/green LEDs for EtherCAT communications status
- ComplianceEU27: CE
United Kingdom: UKCA
US: FCC 15B
Canada: CAN ICES-3(B)/NMB-3(B)
Australia: AS CISPR11
South Korea: KC
Japan: JIS C 61326-1
Taiwan: CNS 13803
EtherCAT: ETG.5003.2080 S (R) V1.30n Vacuum Pressure Gauge
When connected to a properly shielded cable, grounded at both ends.
Resources
Literature
DA07A Absolute Baratron® Digital Capacitance Manometer with EtherCAT® (1-1000 Torr/mbar Full Scale)(1.9 MB, PDF)
Manuals
DA07A Capacitance Manometer Manual(1.3 MB, PDF) DA07A Pin-outs(41.7 kB, PDF)
Drawings & CAD
DA07A Dimensional Drawing(883.8 kB, PDF)
