Dissolved Carbon Dioxide (DI-CO2) Ultrapure Water Delivery System
Model: DI-CO2
Dissolved Carbon Dioxide (DI-CO2) Ultrapure Water Delivery System
Model: DI-CO2
Overview
Overview
The DI-CO2 is used in single substrate cleaning tools for rinsing steps to prevent ESD effects and/or corrosion by creating UPW (ultrapure water) with precisely defined conductivity. It is a compact system for tool integration, providing conductive DI-CO2 water (carbonated ultra-pure water) with closed loop controlled conductivity. The conductivity is kept at a constant value under changing flow conditions by control of the CO2concentration in the DI-CO2 water.
Technical Specs
- TypeDisolved CO2 System
- Flow RateMinimum total flow: 0.5 L/min (0.1 gpm), Maximum total flow: 90 L/min (15.8 gpm)
- CommunicationBinary in/out (dry contacts), RS232, analog out, USB
- Power Requirements24 VDC, 60 W
- AccuracyTypical maximum deviation from set point: Steady state flow: ±3%, Fluctuating flow: ±10% for flow changes <4 L/min per sec
- UPW Temperature Range20 - 50°C
- Outlet Pressure1.0 - 3.0 barg (0.1 - 0.3 MPag, 14.5 - 43.5 psig), depending on UPW supply pressure
- Conductivity/Resistivity RangeMinimum conductivity 5 µS/cm, max. resistivity 200 kOhm*cm Maximum conductivity 50 µS/cm, min resistivity 20 kOhm*cm, for System Pressure greater than or equal to 2 barg
- MeasurementAvailable with integrated or external sensor
- ConnectionSuper 300 Type Pillar Fitting or Flaretek®
- Plumbing MaterialsLiquid contacted surfaces: PFA, PVDF
- Cabinet MaterialPVDF, C-PVC or FRPP
- Dimensions386 x 650 x 232 mm (WxHxD) (approximate)
- Weight17.3 kg (empty), 23.3 kg (filled with water) (approximate)
Technical Specs
- TypeDisolved CO2 System
- Flow RateMinimum total flow: 0.5 L/min (0.1 gpm), Maximum total flow: 90 L/min (15.8 gpm)
- CommunicationBinary in/out (dry contacts), RS232, analog out, USB
- Power Requirements24 VDC, 60 W
- AccuracyTypical maximum deviation from set point: Steady state flow: ±3%, Fluctuating flow: ±10% for flow changes <4 L/min per sec
- UPW Temperature Range20 - 50°C
- Outlet Pressure1.0 - 3.0 barg (0.1 - 0.3 MPag, 14.5 - 43.5 psig), depending on UPW supply pressure
- Conductivity/Resistivity RangeMinimum conductivity 5 µS/cm, max. resistivity 200 kOhm*cm Maximum conductivity 50 µS/cm, min resistivity 20 kOhm*cm, for System Pressure greater than or equal to 2 barg
- MeasurementAvailable with integrated or external sensor
- ConnectionSuper 300 Type Pillar Fitting or Flaretek®
- Plumbing MaterialsLiquid contacted surfaces: PFA, PVDF
- Cabinet MaterialPVDF, C-PVC or FRPP
- Dimensions386 x 650 x 232 mm (WxHxD) (approximate)
- Weight17.3 kg (empty), 23.3 kg (filled with water) (approximate)
Resources & Downloads
Drawings & CADs
DI-CO2 Dimensional Drawing(140.4 kB, PDF)