The DELTA™ IV EtherCAT® 4-zone Flow Ratio Controller is a digital controlled, browser-enabled, process control instrument providing the latest gas flow ratio measurement and control technology to meet the demands of multi-channel flow distribution for semiconductor, flat panel, and solar panel process uniformity and control. DELTA™ mass flow ratio controllers divide and control mixed process gas flows to multiple chambers or zones at user-specified proportions, optimizing process uniformity and repeatability. DELTA™ IV EtherCAT® mass flow ratio controllers are used in a variety of flow splitting applications such as etch, strip, and CVD.