E27H 0.02-100 Torr Heated (45°C) Baratron® Capacitance Manometers with Etch Sensor
Model: E27h
E27H 0.02-100 Torr Heated (45°C) Baratron® Capacitance Manometers with Etch Sensor
Model: E27h

Overview
Overview
The E27H temperature regulated capacitance manometer features structures in the sensor housing that eliminate process byproducts from depositing on the surface of the diaphragm, minimizing drift. The E27H Baratron® manometer is temperature controlled to 45°C, accurate to 0.12% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability. Optional heater and temperature status LED/switches indicate that the heater (which maintains the sensor temperature to 45°C) is in control. This capacitance manometer is available in Full Scale ranges down to 50 mTorr (0.07 mbar) to accommodate today's lower process pressures. Based on established Baratron° capacitance manometer technology, the sensor's wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 127, 627, and E27 Baratron® capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or the user's compatible power supply/readout devices.