Multi-gas, Multi-range, Metal-sealed 50 to 100 slm Mass Flow Controller
Multi-gas, Multi-range, Metal-sealed 50 to 100 slm Mass Flow Controller
The G-Series GM100A digitally-controlled mass flow controller is available with either analog (0 to 5 VDC or 4 to 20 mA) or RS485, Profibus™, EtherCAT®, PROFINET, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
- Flow Rates from 50 to 100 slm
- Metal sealed with elastomer plug
- Wide choice of digital (EtherCAT, DeviceNet™, Profibus®, PROFINET and RS485) or analog (0-5 VDC or 4-20 mA) I/O
- Standard closed conductance leak rate of less than 1.0% of Full Scale
- Less than 750 millisecond settling time See All Features
Configuration Options
The following options are available for GM100A Metal-sealed 50-100 slm Mass Flow Controllers
Ordering Code Example: GM100A013105T6MB020
|
Configuration Option |
Option Code |
|---|---|
| GM100A Mass Flow Controller | GM100A |
Gas (Per Semi Standard E52-0703) |
|
| Nitrogen (N2) | 013 |
| Ammonia (NH3) | 029 |
| Sulfur Hexafluoride (SF6) | 110 |
| Other Gas Options | See Here |
Flow Range Full Scale |
|
| 50000 sccm | 504 |
| 75000 sccm | 754 |
| 100000 sccm | 105 |
Fittings (compatible with) |
|
| 10 mm Swagelok | P |
| 12 mm Swagelok | F |
| 1/2 in. Swagelok | K |
| 3/8 in. Swagelok | J |
| 4 VCR Male | R |
| 8 VCR Male | T |
| 8 VCO Male | D |
| NW16 ISO-KF | U |
Connector |
|
| EtherCAT | 8 |
| DeviceNet | 6 |
| RS485 (uses 9 pin connector) | 5 |
| Profibus (1480 Compatible) | 4 |
| Profibus (1179B Compatible) | 3 |
| PROFINET | 9 |
| Analog 0 to 5 VDC (9 pin D connector) | A |
| Analog 0 to 5 VDC (9 Pin D connector), Tied Grounds | L |
| Analog 0 to 5 VDC (15 pin D connector) | B |
| Analog 0 to 5 VDC (15 pin D connector), Tied Grounds | M |
| Analog 4 to 20 mA (15 pin D connector) | H |
Valve/Device Type |
|
| Normally Closed | M |
| Mass Flow Meter | 3 |
Seal Materials |
|
| Buna Valve Plug | B |
| Neoprene Valve Plug | N |
| Viton Valve Plug | V |
| EPDM Valve Plug | E |
| No Valve (MFM Option) | 0 |
Reserved |
|
| Reserved | 0 |
Firmware |
|
| MKS will ship firmware revision current to date | 20 |
Specifications
- Full Scale Flow Range50,000 - 100,000 sccm (N2 equivalent)
- Control Range2% to 100% of Full Scale
- Flow Input Output SignalVoltage: (0 to 5 VDC) 15 pin Type "D" male, 9 pin Type "D" male, Current: (4 to 20 mA) 15 pin Type "D" male
- Maximum Inlet Pressure150 psig
- Normal Operating Pressure Differential50,000 - 100,000 sccm; 40 to 80 psid
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Typical Accuracy± 1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
- Repeatability±0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Inlet Pressure Coefficient<0.02% of Reading/psi
- Typical Settling Time<750 msec., typical above 10% Full Scale
- Warm-up Time30 minutes
- Operating Temperature10° to 50°C
- Storage Humidity0 to 95% Relative Humidity, non-condensing
- Storage Temperature-20° to 80°C
- External Leak Integrity<1 x 10-10 (scc/sec He)
- Leak Integrity Through Closed Valve<1.0% of Full Scale at 40 psig inlet to atmosphere
- Wetted Materials316L Stainless Steel VAR, 316 Stainless Steel, Elgiloy®, Nickel
- Surface Finish10µ inch average Ra
- Weight3 lbs (1.4 kg)
- ComplianceCE
Features
Wide Choice of Digital and Analog Interfaces
The GM100A digitally controlled MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. The GM100A’s analog and digital I/O can easily be used to replace those same I/O types of the 1179A MFCs. All GM100As include Modbus as an available secondary I/O (excludes PROFINET® and EtherCAT®).
Standard 3 inch Footprint
The GM100A utilizes the standard 3 inch footprint most often used by mass flow controllers in the 5 sccm to 50 slm flow rate range without the need to modify existing gas line configurations, and now operates with flow rates up to 100 slm, N2 equivalent.
Metal Sealed
The GM100A metal sealed MFC features a 10 µ inch electropolished 316L surface finish which enables this mass flow controller for use with use in high purity applications.
Percent of Setpoint Accuracy
Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range. Set point accuracy enables precise process control vs accuracy stated relative to full scale. For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.
Embedded User Interface
An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.
Patented Thermal Sensor
A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.
Communication Options/Specifications
| Digital I/O | DeviceNet™ | RS485 | Profibus® | EtherCAT® | PROFINET® |
|---|---|---|---|---|---|
| Input Power Required | +11 to +25 VDC per (<2 watts) | +15 to +24 VDC (<2 watts) | +15 to +24 VDC (<2 watts) | +24 VDC (<3 watts) | +24 VDC (<3 watts) |
| Connector | 5 pin micro connector (power and comm.) | 9 pin Type D male (power and comm.) | 9 pin Type D male (power) 9 pin Type D female (comm.) |
2 x RJ-45 (comm.) male, M8 male, 5 pin (power) |
2 x RJ-45 (comm.) male, M8 male, 5 pin (power) |
| Data Rate Switch/Selection | 4 positions: 125, 250, 500K (Default) (programmable over network) |
No switch Set data rate via RS485 | No switch Set data rate via Profibus | No switch | No switch |
| Comm. Rate(s) | 125 Kbps; 250 Kbps; 500 Kbps | 9.6 Kbps; 19.2 Kbps 38.4 Kbps | 9.6 Kbps to 12 Mbps | 100 Mbps | 100 Mbps |
| MAC ID Switches/Addresses | 2 switches, 10 positions; 0,0 to 6,3 1 to 254 | Set address over RS485 Station Addresses 0,0 to 9,9 | 2 switches, 10 positions | 3 switches, 16 positions | N/A |
| Network Size | Up to 64 nodes | Up to 32 nodes | Up to 99 nodes | Up to 4095 nodes | N/A |
| Visual Indicators | LED Network (green/red) LED Module (green/red) |
LED Comm (yellow) LED Error (red) |
LED Comm (green/red) LED Error (green/red) |
LED Power (green) LED Run (green) LED Error (red) LED Comm (green) |
LED Maint (amber) LED BUS Fault (red) LED Ready (green) LED Sys Fault (red) |
| Compliance | CE | CE | CE | CE | CE |
Accessories
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
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Resources
Literature
GM100A Metal Sealed, Mass Flow Controller, 1-100 slm(402 kB, PDF)
Application Notes
Accelerated Automotive Emission Control Catalyst Research(0, PDF) Gas Delivery for Plasma Spray Coating Applications(320.8 kB, PDF) MFCs for Gas Control in Case Hardening Processes(246.3 kB, PDF) Sample Gas Codes for Mass Flow Controllers/Meters Gas Correction Factors for Thermal-based Mass Flow
Manuals
G and I Series Mass Flow Controller/Meter Manual(2.2 MB, PDF) G-Series Mass Flow Controller/Meter DeviceNet™ Supplement(112.5 kB, PDF) G and I-Series Mass Flow Controller/Meter Profibus Manual Supplement(86.9 kB, PDF) G-Series Mass Flow Controller/Meter PROFINET Communications Supplement(1 MB, PDF) G-Series Mass Flow Controller/Meter RS485 Supplement(149.3 kB, PDF) G-Series/I-Series MFC Modbus Register Map and Specification(502.9 kB, PDF) G-Series MFC Web Browser Tutorial(5.6 MB, PDF) G-Series Mass Flow Controller & Meter EtherCAT Manual Supplement(1.1 MB, PDF)
Drawings & CADs
GM100 Mass Flow Controller 3D Model Files GM100A Mass Flow Controller/Meter Dimensional Drawing(287.7 kB, PDF)
Device Description Files
GM100A Profibus GSD File (1179B compatible)(2.5 kB, GSD) GM100A Profibus GSD File (1480 compatible)(2.6 kB, GSD) GM100A ESI File(132 kB, XML) GM100A EDS File(346.2 kB, EDS)
