R-Series Vacuum Gate Valve
Model: GVRAD080SSPVNN0000
R-Series Vacuum Gate Valve
Model: GVRAD080SSPVNN0000
Overview
Overview
The GVRAD080SSPVNN0000, a stainless-steel Gate Valve with a DN80 bore, Viton/FKM seals, and pneumatic actuation, is heatable to 105°C. It is optimized for isolation of roughing pumps and roughing lines in both semiconductor and general vacuum applications.
Technical Specs
- TypeGate Valve
- Flange SizeDN80
- Seal MaterialViton/FKM
- ActuationPneumatic
- Actuation Time<2 sec
- Actuator Temperature10 - 80°C
- Limit SwitchesNone
- Limit SwitchNo
- Pressure Range1* 10-7 to 1200 Torr (1.3* 10-10 - 1.6 bar)
- MaterialStainless Steel
- Actuator SealElastomer shaft seal
- Bypass OptionNone
- HeatingHeatable to 105°C
- SolenoidsNone
- Pneumatic Pressure5.4 ±1.3 atm (80 ±20 psig)
- Side to Side Leak Rate1* 10-9 atm*cc/sec
- External Leak Rate1* 10-9 atm*cc/sec
- Max Delta Pressure - Operating<22.5 Torr (30 mbar) chamber side high*
<22.5 Torr (30 mbar) pump side high
*Valve is operable up to 760 Torr (1 bar) chamber side high, but cycle life will be reduced with operation >30 mbar. - Max Delta Pressure - Closed1.6 atm, either direction
- Maintenance200,000 cycles before maintenance
Technical Specs
- TypeGate Valve
- Flange SizeDN80
- Seal MaterialViton/FKM
- ActuationPneumatic
- Actuation Time<2 sec
- Actuator Temperature10 - 80°C
- Limit SwitchesNone
- Limit SwitchNo
- Pressure Range1* 10-7 to 1200 Torr (1.3* 10-10 - 1.6 bar)
- MaterialStainless Steel
- Actuator SealElastomer shaft seal
- Bypass OptionNone
- HeatingHeatable to 105°C
- SolenoidsNone
- Pneumatic Pressure5.4 ±1.3 atm (80 ±20 psig)
- Side to Side Leak Rate1* 10-9 atm*cc/sec
- External Leak Rate1* 10-9 atm*cc/sec
- Max Delta Pressure - Operating<22.5 Torr (30 mbar) chamber side high*
<22.5 Torr (30 mbar) pump side high
*Valve is operable up to 760 Torr (1 bar) chamber side high, but cycle life will be reduced with operation >30 mbar. - Max Delta Pressure - Closed1.6 atm, either direction
- Maintenance200,000 cycles before maintenance
Resources & Downloads
Literature
R Series Gate Valve(413.9 kB, PDF)
Drawings & CADs
R Series Gate Valve Dimensional Drawings(322.1 kB, PDF)