High Accuracy Mass Flow Verifier
Model: HA-MFV
High Accuracy Mass Flow Verifier
Model: HA-MFV
Overview
Overview
The HA-MFV High Accuracy Mass Flow Verifier is designed for use on process tools to verify mass flow control flow rates in-situ. Available with EtherCAT® or DeviceNet™ communications and measurement accuracy of 1.0% of reading, the HA-MFV can verify MFC flow with the actual process gas significantly better than older rate-of-rise devices or process chamber rate-of rise methods. The HA-MFV is more accurate and is insensitive to external volume (from MFC to the HA-MFV) and variation, delivering more precise matching of measurements between devices on multiple tools for the same process, assuring precise tool-to-tool process matching. The HA-MFV, High Accuracy Mass Flow Verifier is designed for use in gas-based process tools requiring fast, accurate verification of mass flow controllers and meters.
Technical Specs
- TypeMass Flow Verifier
- Repeatability±0.5% of Reading
- Reproducibility±0.3% of Reading
- Pressure Range100 Torr
- Pressure Accuracy0.25% of Reading
- Proof Pressure45 psia
- Burst Pressure150 psig
- Minimum Penumatic Air Supply Pressure80 psig
- Maximum Penumatic Air Supply Pressure100 psig
- Span Temperature Coefficient<0.002% Reading/°C
- Warm-up Time60 minutes
- Operating Temperature10 - 40°C
- Temperature Display0 - 100°C
- Temperature Accuracy± 2°C
- Temperature Resolution0.1°C
- Storage Humidity0 - 95% RH non-condensing
- Storage Temperature-20 - 60°C (-4 - 160°F)
- Control InterfaceDeviceNet: 5-pin DeviceNet Micro Connector Type, EtherCAT: Dual RJ-45 (Comm.) M8 Male 5pin (PWR)
- Diagnostic InterfaceEthernet RJ-45 female
- Input VoltageDeviceNet: 11-25 VDC, EtherCAT: 11-25VDC +24 VDC (±10%)
- Maximum Current Required at Start-up+24 VDC (±5%) @ 500 mA
- Average Current Required at Steady State+24 VDC (±5%) @ 375 mA (valves closed)
- Gas Supply FittingSwagelok® compatible 8-VCR® female rotatable
- Vacuum Supply FittingSwagelok® compatible 8-VCR® male type, rotatable
- Pneumatic Air Supply Fitting1/8 inch one-touch quick connect tube
- External Leak Integrity<1 x 10-9 scc/sec He
- Wetted Materials316L SST passivated, Inconel, Incoloy, 316 nickel-plated stainless steel
- Valve Seat MaterialPCTFE with Elgiloy® Diaphragm
- Surface Finish<32 µinches Ra
- Dimensions6.98 x 10.0 x 10.0 in. (177.3 x 254.0 x 254.0 mm) (height x width x length)
- Weight23.9 lbs (10.9 kg)
- ComplianceCE
- Temperature Readout Units°C
- Full Scale Verification Range5 - 3000 sccm (N2 equivalent)
- Typical Accuracy±1.0% of Reading
Technical Specs
- TypeMass Flow Verifier
- Repeatability±0.5% of Reading
- Reproducibility±0.3% of Reading
- Pressure Range100 Torr
- Pressure Accuracy0.25% of Reading
- Proof Pressure45 psia
- Burst Pressure150 psig
- Minimum Penumatic Air Supply Pressure80 psig
- Maximum Penumatic Air Supply Pressure100 psig
- Span Temperature Coefficient<0.002% Reading/°C
- Warm-up Time60 minutes
- Operating Temperature10 - 40°C
- Temperature Display0 - 100°C
- Temperature Accuracy± 2°C
- Temperature Resolution0.1°C
- Storage Humidity0 - 95% RH non-condensing
- Storage Temperature-20 - 60°C (-4 - 160°F)
- Control InterfaceDeviceNet: 5-pin DeviceNet Micro Connector Type, EtherCAT: Dual RJ-45 (Comm.) M8 Male 5pin (PWR)
- Diagnostic InterfaceEthernet RJ-45 female
- Input VoltageDeviceNet: 11-25 VDC, EtherCAT: 11-25VDC +24 VDC (±10%)
- Maximum Current Required at Start-up+24 VDC (±5%) @ 500 mA
- Average Current Required at Steady State+24 VDC (±5%) @ 375 mA (valves closed)
- Gas Supply FittingSwagelok® compatible 8-VCR® female rotatable
- Vacuum Supply FittingSwagelok® compatible 8-VCR® male type, rotatable
- Pneumatic Air Supply Fitting1/8 inch one-touch quick connect tube
- External Leak Integrity<1 x 10-9 scc/sec He
- Wetted Materials316L SST passivated, Inconel, Incoloy, 316 nickel-plated stainless steel
- Valve Seat MaterialPCTFE with Elgiloy® Diaphragm
- Surface Finish<32 µinches Ra
- Dimensions6.98 x 10.0 x 10.0 in. (177.3 x 254.0 x 254.0 mm) (height x width x length)
- Weight23.9 lbs (10.9 kg)
- ComplianceCE
- Temperature Readout Units°C
- Full Scale Verification Range5 - 3000 sccm (N2 equivalent)
- Typical Accuracy±1.0% of Reading
Resources & Downloads
Drawings & CADs
HA-MFV, High Accuracy Mass Flow Verifier Dimensional Drawing(358.4 kB, PDF)