The MultiGas™ FTIR Gas Analyzer, Model 2031, is an FTIR based analyzer that ensures high gas purity by detecting ppb level contaminants in bulk process gases such as NH3, NF3, and H2. The analyzer uses an FTIR Spectrometer, high-optical throughput sampling cell, and application specific analysis software to ensure gas purity. These integrated components ensure high precision and accuracy for bulk gas contaminant monitoring. Multiple detector and gas cell options are available which allow the analyzer to be tailored to the process.

Applications

Continuous monitoring of trace contaminants in high purity bulk gases in production environments, including:

• H2O, CO, CO2, N2O and CH4 in NH3
• H2O, CO, CO2, N2O and HF in NF3
• H2O, CO, CO2, HF, HCI, NH3, CH2CI2 and CHCI3 in H2
• H2O, CO, CO2, CH4, and NH3 in N2O