Chemical Downstream Plasma Source
Model: SA7610SAPP4
Chemical Downstream Plasma Source
Model: SA7610SAPP4
Overview
Overview
The SA7610SAPP4 is a replaceable sapphire plasma tube for the AX7610S is a microwave plasma source, ideally suited for more severe CF4 CHF3 and NF3 chemistries.
Technical Specs
- TypeSapphire Tube Assembly
- Plasma Tube MaterialSapphire
Technical Specs
- TypeSapphire Tube Assembly
- Plasma Tube MaterialSapphire