CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Controller
Model: c-series-mass-flow-controller
CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Controller
Model: c-series-mass-flow-controller
Technical Specs
Type
Mass Flow Controller
Full Scale Flow Range
15-14,000 sccm (N2)
Maximum Inlet Pressure
80 psig
Normal Operating Pressure Differential
15 to 7000 sccm: 10 to 45 psid (N2)
7001 to 14000: 15 to 45 psid (N2)
Proof Pressure
232 psi/16 bar
Burst Pressure
1000 psi/70 bar
Control Range
Digital I/O: 0.1-100% of Full Scale
Analog I/O: 0.2-100% of Full Scale
(typical)
Typical Accuracy
±0.8% of set point for 20-100% Full Scale
±0.16% of Full Scale for <20% of Full Scale
(with N2 calibration gas)
Repeatability
±0.2% of Reading
Zero Temperature Coefficient
≤0.005% of Full Scale/°C
Span Temperature Coefficient
≤0.06% of Reading/°C
Pressure Coefficient
<0.025% of Reading/psi
Response Time
≤100 ms typical above 10% Full Scale, 50 sccm - 5 slm Full Scale models
≤150 ms typical above 10% Full Scale, 10 slm Full Scale models
(per SEMI Guideline E-17-0600)
Warm-up Time
≤1 min
Operating Temperature
10-50°C (32-122°F)
Storage Temperature
0-60°C (32-140°F)
Fitting Type
Compatible with:
Swagelok® 4 VCR® male
surface mount (o-ring)
0.25 in. Swagelok compression
External Leak Integrity
<1 x 10-09 (scc/sec He)
Leak Integrity Through Closed Valve
<0.1% of max. Full Scale range using valve closed override command
(to assure no flow-through, a separate positive shut-off valve is required)
Wetted Materials
Aluminum, Elgiloy®, 20# Steel, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top
Seal Material
Viton
Valve Position
Normally closed
Set Point Command Signal
0-5 VDC (0-10 VDC, optional)
Power Requirements
24 VDC @ (±10%), <4 watts
Flow Input Output Signal
0-5 VDC (0-10 VDC, optional)
Analog I/O Connector
9-pin Type D
Weight
0.68 lbs (310 grams) (w/VCR fitting)
Compliance
CE
Technical Specs
Type
Mass Flow Controller
Full Scale Flow Range
15-14,000 sccm (N2)
Maximum Inlet Pressure
80 psig
Normal Operating Pressure Differential
15 to 7000 sccm: 10 to 45 psid (N2)
7001 to 14000: 15 to 45 psid (N2)
Proof Pressure
232 psi/16 bar
Burst Pressure
1000 psi/70 bar
Control Range
Digital I/O: 0.1-100% of Full Scale
Analog I/O: 0.2-100% of Full Scale
(typical)
Typical Accuracy
±0.8% of set point for 20-100% Full Scale
±0.16% of Full Scale for <20% of Full Scale
(with N2 calibration gas)
Repeatability
±0.2% of Reading
Zero Temperature Coefficient
≤0.005% of Full Scale/°C
Span Temperature Coefficient
≤0.06% of Reading/°C
Pressure Coefficient
<0.025% of Reading/psi
Response Time
≤100 ms typical above 10% Full Scale, 50 sccm - 5 slm Full Scale models
≤150 ms typical above 10% Full Scale, 10 slm Full Scale models
(per SEMI Guideline E-17-0600)
Warm-up Time
≤1 min
Operating Temperature
10-50°C (32-122°F)
Storage Temperature
0-60°C (32-140°F)
Fitting Type
Compatible with:
Swagelok® 4 VCR® male
surface mount (o-ring)
0.25 in. Swagelok compression
External Leak Integrity
<1 x 10-09 (scc/sec He)
Leak Integrity Through Closed Valve
<0.1% of max. Full Scale range using valve closed override command
(to assure no flow-through, a separate positive shut-off valve is required)
Wetted Materials
Aluminum, Elgiloy®, 20# Steel, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top
Seal Material
Viton
Valve Position
Normally closed
Set Point Command Signal
0-5 VDC (0-10 VDC, optional)
Power Requirements
24 VDC @ (±10%), <4 watts
Flow Input Output Signal
0-5 VDC (0-10 VDC, optional)
Analog I/O Connector
9-pin Type D
Weight
0.68 lbs (310 grams) (w/VCR fitting)
Compliance
CE
Resources & Downloads
Manuals
Drawings & CADs
Application Notes
Literature
Device Description Files
Software
