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  5. CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Meter

CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Meter

Model: cma10b-mass-flow-meter

CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Meter

Model: cma10b-mass-flow-meter

CMA10B 15-14,000 sccm Compact, Fast Response Mass Flow Meter

Technical Specs

  • Type
    Mass Flow Meter
  • Full Scale Flow Range
    15-14,000 sccm (N2)
  • Maximum Inlet Pressure
    80 psig
  • Proof Pressure
    232 psi/16 bar
  • Burst Pressure
    1000 psi/70 bar
  • Measurement Range
    0.1-100% of Full Scale
  • Typical Accuracy
    ±0.8% of Reading
  • Repeatability
    ±0.2% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    ≤0.005% of Full Scale/°C
  • Span Temperature Coefficient
    ≤0.06% of Reading/°C
  • Pressure Coefficient
    <0.025% of Reading/psi
  • Warm-up Time
    ≤1 min
  • Operating Temperature
    10-50°C (32-122°F)
  • Storage Humidity
    0-95% relative humidity, non-condensing
  • Storage Temperature
    0-60°C (32-140°F)
  • Fitting Type
    Compatible with:
    Swagelok® 4 VCR® male
    surface mount (o-ring)
    0.25 in. Swagelok compression
  • External Leak Integrity
    <1 x 10-09
  • Wetted Materials
    Standard: Aluminum, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top
  • Set Point Command Signal
    0-5 VDC (0-10 VDC, optional)
  • Power Requirements
    24 VDC @ (±10%), <2 watts
  • Flow Input Output Signal
    0-5 VDC (0-10 VDC, optional)
  • Analog I/O Connector
    9-pin Type D
  • Weight
    0.45 lbs (204 grams) (VCR)
  • Compliance
    CE (Electrical Analog I/O)

Technical Specs

  • Type
    Mass Flow Meter
  • Full Scale Flow Range
    15-14,000 sccm (N2)
  • Maximum Inlet Pressure
    80 psig
  • Proof Pressure
    232 psi/16 bar
  • Burst Pressure
    1000 psi/70 bar
  • Measurement Range
    0.1-100% of Full Scale
  • Typical Accuracy
    ±0.8% of Reading
  • Repeatability
    ±0.2% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    ≤0.005% of Full Scale/°C
  • Span Temperature Coefficient
    ≤0.06% of Reading/°C
  • Pressure Coefficient
    <0.025% of Reading/psi
  • Warm-up Time
    ≤1 min
  • Operating Temperature
    10-50°C (32-122°F)
  • Storage Humidity
    0-95% relative humidity, non-condensing
  • Storage Temperature
    0-60°C (32-140°F)
  • Fitting Type
    Compatible with:
    Swagelok® 4 VCR® male
    surface mount (o-ring)
    0.25 in. Swagelok compression
  • External Leak Integrity
    <1 x 10-09
  • Wetted Materials
    Standard: Aluminum, Stainless Steel, Silicon, Silicon Oxide, Silicon Carbide, Viton®, Glob Top
  • Set Point Command Signal
    0-5 VDC (0-10 VDC, optional)
  • Power Requirements
    24 VDC @ (±10%), <2 watts
  • Flow Input Output Signal
    0-5 VDC (0-10 VDC, optional)
  • Analog I/O Connector
    9-pin Type D
  • Weight
    0.45 lbs (204 grams) (VCR)
  • Compliance
    CE (Electrical Analog I/O)

Resources & Downloads

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