DA03B Heated (150 - 200°C) 1 - 1000 Torr, Absolute Baratron® Capacitance Manometer with EtherCAT®
Model: da03b-heated-ethercat-manometer
DA03B Heated (150 - 200°C) 1 - 1000 Torr, Absolute Baratron® Capacitance Manometer with EtherCAT®
Model: da03b-heated-ethercat-manometer
Technical Specs
Type
Pressure Transducer
Sensor Type
Capacitance Manometer
Measurement Type
Absolute
Full Scale Range
1, 2, 3, 5, 10, 20, 100, 1000 Torr
Accuracy
±0.25% of Reading
Fitting Type
Standard:
0.5 in. (12 mm) OD tube
Optional:
Swagelok® 8 VCR® female, 8 VCR male, NW16-KF, NW25-KF, Mini-CF, 1.5 in. TriClover, 2 in. TriClover
Analog Output
Analog 0-10 VDC into >10kW load, EtherCAT
Trip Relays
Standard:
Two (2) internal solid state relays provided for heater "at temperature" status and heater failure. Relay capacity of 1 amp at 30 VDC.
Optional:
Two (2) internally mounted process pressure trip relays, solid state, independently adjustable by customer at atmospheric pressure from 0.5% to 100% of Full Scale range. Relay capacity of 1 amp @ 30 VDC.
Resolution
0.001% of Full Scale
Zero Temperature Coefficient
150°C/160°C:
±0.004% Full Scale/°C for >1 Torr
±0.008% Full Scale/°C for 1 Torr range
200°C:
±0.008% Full Scale/°C for >1 Torr
±0.016% Full Scale/°C for 1 Torr range
Span Temperature Coefficient
±0.02% Reading/°C
Response Time
Analog/Digital:
35 ms (nominal) influenced by pressure range, step size, and digital pressure filter settings
EtherCAT:
Refresh Rate = 3.3 ms
Warm-up Time
2.5 hours typical
Internal Volume
6.3 cm3 typical. Contact MKS for volumes with specific flanges.
Operating Temperature
15 - 50°C
Overpressure Limit
45 psia
Materials Exposed to Process Gases
Inconel® and Incoloy® nickel alloys (some fitting options are 300 Series Stainless)
Power Requirements
±15 VDC @ 1.6A or +24 VDC @ 1.3A at start up (factory set)
Ambient Airflow Requirements
150/160°C Models:
50 ft/min for ambient temperatures of 40 - 50°C
200°C Models:
150 ft/min for ambient temperatures of 40 - 50°C
Compliance
CE, UL1577 (Trip Relays only)
Technical Specs
Type
Pressure Transducer
Sensor Type
Capacitance Manometer
Measurement Type
Absolute
Full Scale Range
1, 2, 3, 5, 10, 20, 100, 1000 Torr
Accuracy
±0.25% of Reading
Fitting Type
Standard:
0.5 in. (12 mm) OD tube
Optional:
Swagelok® 8 VCR® female, 8 VCR male, NW16-KF, NW25-KF, Mini-CF, 1.5 in. TriClover, 2 in. TriClover
Analog Output
Analog 0-10 VDC into >10kW load, EtherCAT
Trip Relays
Standard:
Two (2) internal solid state relays provided for heater "at temperature" status and heater failure. Relay capacity of 1 amp at 30 VDC.
Optional:
Two (2) internally mounted process pressure trip relays, solid state, independently adjustable by customer at atmospheric pressure from 0.5% to 100% of Full Scale range. Relay capacity of 1 amp @ 30 VDC.
Resolution
0.001% of Full Scale
Zero Temperature Coefficient
150°C/160°C:
±0.004% Full Scale/°C for >1 Torr
±0.008% Full Scale/°C for 1 Torr range
200°C:
±0.008% Full Scale/°C for >1 Torr
±0.016% Full Scale/°C for 1 Torr range
Span Temperature Coefficient
±0.02% Reading/°C
Response Time
Analog/Digital:
35 ms (nominal) influenced by pressure range, step size, and digital pressure filter settings
EtherCAT:
Refresh Rate = 3.3 ms
Warm-up Time
2.5 hours typical
Internal Volume
6.3 cm3 typical. Contact MKS for volumes with specific flanges.
Operating Temperature
15 - 50°C
Overpressure Limit
45 psia
Materials Exposed to Process Gases
Inconel® and Incoloy® nickel alloys (some fitting options are 300 Series Stainless)
Power Requirements
±15 VDC @ 1.6A or +24 VDC @ 1.3A at start up (factory set)
Ambient Airflow Requirements
150/160°C Models:
50 ft/min for ambient temperatures of 40 - 50°C
200°C Models:
150 ft/min for ambient temperatures of 40 - 50°C
Compliance
CE, UL1577 (Trip Relays only)
