DA05A Heated Baratron® Capacitance Manometer with EtherCAT® (Full Scale Pressures <1 Torr/mbar)
Model: da05A-ethercat-capacitance-manometers
DA05A Heated Baratron® Capacitance Manometer with EtherCAT® (Full Scale Pressures <1 Torr/mbar)
Model: da05A-ethercat-capacitance-manometers
Technical Specs
Type
Vacuum/pressure Transducer
Measurement Type
Absolute
Sensor Temperature
Controlled to 45°C, 80°C or 100°C
Full Scale Pressure Ranges
0.10, 0.25 Torr (100, 250 mTorr)
Accuracy
45°C: 0.15% Reading for ranges <1 Torr, 0.10% of Reading for ranges =1 Torr
80°C & 100°C: 0.50% of Reading for ranges <1 Torr, 0.25% of Reading for ranges =1 Torr
Resolution
0.001% Full Scale
Response Time
Pressure: 12 ms nominal (10-90% of a step response) influenced by step size and digital pressure filter setting
EtherCAT Update Rate:Refresh Rate 1 ms
Fitting Type
0.5 in. (12 mm) OD tube
8 VCR® male or female compatible
NW16KF
1.33 in. (34 mm) OD CF
Output Signal
Analog: 0-10 VDC into >10 kΩ load
Digital: EtherCAT
Electrical Connector
Analog:15-pin D-subminiature male
EtherCAT: Two RJ45 female receptacles for incoming and network signals
Zero Temperature Coefficient
45°C: 0.005% Full Scale/°C for ranges <1 Torr, 0.002%% Full Scale/°C for ranges =1 Torr
80°C & 100°C: 0.010% Full Scale/°C for ranges <1 Torr, 0.002% Full Scale/°C for ranges =1 Torr
Span Temperature Coefficient
0.02% Reading/°C
Operating Temperature Range
45°C: 15-40°C
80°C & 100°C: 15-60°C
Volume
6.3 cm3 for 0.5 in. OD tube fitting.
Volumes with other fitting available on request
Warm-up Time
4 hours nominal
Overpressure Limit
45 psia (310 kPa)
Materials Exposed to Process Gases
Inconel and Incoloy nickel alloys
(Fittings are made from 300 series stainless steel)
Power Requirements
45°C: +24 VDC ±10% @ 560 mA, ±15 VDC @ 480 mA
80°C & 100°C: +24 VDC ±10% @ 800 mA, ±15 VDC @ 700 mA
Output Relays
Standard:Two solid state relays for "sensor ready" and "device fault" status.
Optional:Two optional internally mounted process pressure trip relays, solid state, independently adjustable through EtherCAT by customer at atmospheric pressure from 0.5% to 100% of Full Scale range.
(Relay capacity of 0.375 amps @ 30 VDC. Complies with UL1577 requirements)
Indicators
Multicolor status LED and two (2) red/green LEDs for EtherCAT communications status
Compliance
EU27: CE
United Kingdom: UKCA
US: FCC 15B
Canada: CAN ICES-3(B)/NMB-3(B)
Australia: AS CISPR11
South Korea: KC
Japan: JIS C 61326-1
Taiwan: CNS 13803
EtherCAT: ETG.5003.2080 S (R) V1.30 Vacuum Pressure Gauge
Technical Specs
Type
Vacuum/pressure Transducer
Measurement Type
Absolute
Sensor Temperature
Controlled to 45°C, 80°C or 100°C
Full Scale Pressure Ranges
0.10, 0.25 Torr (100, 250 mTorr)
Accuracy
45°C: 0.15% Reading for ranges <1 Torr, 0.10% of Reading for ranges =1 Torr
80°C & 100°C: 0.50% of Reading for ranges <1 Torr, 0.25% of Reading for ranges =1 Torr
Resolution
0.001% Full Scale
Response Time
Pressure: 12 ms nominal (10-90% of a step response) influenced by step size and digital pressure filter setting
EtherCAT Update Rate:Refresh Rate 1 ms
Fitting Type
0.5 in. (12 mm) OD tube
8 VCR® male or female compatible
NW16KF
1.33 in. (34 mm) OD CF
Output Signal
Analog: 0-10 VDC into >10 kΩ load
Digital: EtherCAT
Electrical Connector
Analog:15-pin D-subminiature male
EtherCAT: Two RJ45 female receptacles for incoming and network signals
Zero Temperature Coefficient
45°C: 0.005% Full Scale/°C for ranges <1 Torr, 0.002%% Full Scale/°C for ranges =1 Torr
80°C & 100°C: 0.010% Full Scale/°C for ranges <1 Torr, 0.002% Full Scale/°C for ranges =1 Torr
Span Temperature Coefficient
0.02% Reading/°C
Operating Temperature Range
45°C: 15-40°C
80°C & 100°C: 15-60°C
Volume
6.3 cm3 for 0.5 in. OD tube fitting.
Volumes with other fitting available on request
Warm-up Time
4 hours nominal
Overpressure Limit
45 psia (310 kPa)
Materials Exposed to Process Gases
Inconel and Incoloy nickel alloys
(Fittings are made from 300 series stainless steel)
Power Requirements
45°C: +24 VDC ±10% @ 560 mA, ±15 VDC @ 480 mA
80°C & 100°C: +24 VDC ±10% @ 800 mA, ±15 VDC @ 700 mA
Output Relays
Standard:Two solid state relays for "sensor ready" and "device fault" status.
Optional:Two optional internally mounted process pressure trip relays, solid state, independently adjustable through EtherCAT by customer at atmospheric pressure from 0.5% to 100% of Full Scale range.
(Relay capacity of 0.375 amps @ 30 VDC. Complies with UL1577 requirements)
Indicators
Multicolor status LED and two (2) red/green LEDs for EtherCAT communications status
Compliance
EU27: CE
United Kingdom: UKCA
US: FCC 15B
Canada: CAN ICES-3(B)/NMB-3(B)
Australia: AS CISPR11
South Korea: KC
Japan: JIS C 61326-1
Taiwan: CNS 13803
EtherCAT: ETG.5003.2080 S (R) V1.30 Vacuum Pressure Gauge
Resources & Downloads
Literature
Drawings & CADs