DA06A 3 Decade Heated Baratron® Capacitance Manometer with EtherCAT®
Model: da06a-3-decade-heated-manometer
DA06A 3 Decade Heated Baratron® Capacitance Manometer with EtherCAT®
Model: da06a-3-decade-heated-manometer
Technical Specs
Type
Temperature-Controlled Capacitance Manometer
Accuracy
1000 mT to 10mT: ±0.4% of Reading
8 mT: ±0.5% of Reading
5 mT: ±0.7% of Reading
3 mT: ±0.8% of Reading
2 mT: ±1.0% of Reading
1 mT3: ±1.5% of Reading
Response Time
Pressure: 12 ms nominal (10-90% of a step response) influenced by step size and digital pressure filter setting
EtherCAT: Refresh Rate 1 ms
Fitting Type
0.50 in. OD tube, 8 VCR Female, 8 VCR Male, NW16-KF, NW25-KF, Mini-CF (1.33 in.)
Contact MKS if alternative fitting is required.
Output Signal
EtherCAT®
Electrical Connector
Power: 15-pin D-subminiature male
EtherCAT: Two RJ45 female receptacles for incoming and network signals
Zero Temperature Coefficient
0.002% Full Scale/°C
Span Temperature Coefficient
0.02% Reading/°C
Ambient Operating Temperature
15° to 60°C (15-40 for 45°C manometer)
Volume
6.3 cm3 typical.
Contact MKS for volumes with specific flanges.
Warm-up Time
4 hours
Overpressure Limit
45 psia (310 kPA)
Materials Exposed to Process Gases
Inconel® and Incoloy® nickel alloys (Fittings 300 Series Stainless Steel)
Power Requirements
+24 VDC ±10% @ 700 mA max
±15 VDC ±5% @ 700 mA max
Indicators
Green RUN LED and Red ERR LED for EtherCAT and Manometer status
Green Link/Activity Indicator on bottom right of RJ45 connectors
Rotary hex switches supporting configured station alias and explicit device identification
Compliance
CE, UKCA
Technical Specs
Type
Temperature-Controlled Capacitance Manometer
Accuracy
1000 mT to 10mT: ±0.4% of Reading
8 mT: ±0.5% of Reading
5 mT: ±0.7% of Reading
3 mT: ±0.8% of Reading
2 mT: ±1.0% of Reading
1 mT3: ±1.5% of Reading
Response Time
Pressure: 12 ms nominal (10-90% of a step response) influenced by step size and digital pressure filter setting
EtherCAT: Refresh Rate 1 ms
Fitting Type
0.50 in. OD tube, 8 VCR Female, 8 VCR Male, NW16-KF, NW25-KF, Mini-CF (1.33 in.)
Contact MKS if alternative fitting is required.
Output Signal
EtherCAT®
Electrical Connector
Power: 15-pin D-subminiature male
EtherCAT: Two RJ45 female receptacles for incoming and network signals
Zero Temperature Coefficient
0.002% Full Scale/°C
Span Temperature Coefficient
0.02% Reading/°C
Ambient Operating Temperature
15° to 60°C (15-40 for 45°C manometer)
Volume
6.3 cm3 typical.
Contact MKS for volumes with specific flanges.
Warm-up Time
4 hours
Overpressure Limit
45 psia (310 kPA)
Materials Exposed to Process Gases
Inconel® and Incoloy® nickel alloys (Fittings 300 Series Stainless Steel)
Power Requirements
+24 VDC ±10% @ 700 mA max
±15 VDC ±5% @ 700 mA max
Indicators
Green RUN LED and Red ERR LED for EtherCAT and Manometer status
Green Link/Activity Indicator on bottom right of RJ45 connectors
Rotary hex switches supporting configured station alias and explicit device identification
Compliance
CE, UKCA
