Unheated: 0.25% of Reading 45°C: 0.10% of Reading 80°C & 100°C: 0.25% of Reading Includes non-linearity, hysteresis, and non-repeatability. Accuracy specification and NIST-traceable calibration points included on calibration sheet are from Full Scale to 10% of Full Scale.
Resolution
0.001% Full Scale Theoretical resolution under ideal laboratory conditions. Actual resolution in service is usually determined by system design factors not under MKS’s control.
Response Time
Pressure: 12 ms nominal (10-90% of a step response) influenced by step size and digital pressure filter setting EtherCAT Update Rate: Refresh Rate 1 ms
Fitting Type
0.5 in. OD tube 8 VCR (compatible) female 8 VCR (compatible) male 8 VCR (compatible) female, short tube NW16 ISO-KF 1.33 in. OD CF (rotatable)
Output Signal
Analog: 0-10 VDC into >10 kΩ load Digital: EtherCAT
Electrical Connector
Analog: 15-pin D-subminiature male EtherCAT: Two (2) RJ45 female receptacles for incoming and network signals
Zero Temperature Coefficient
Unheated: 0.015% Full Scale/°C for 1 Torr 0.010% Full Scale/°C for 2 Torr 0.005% Full Scale/°C for 10-1000 Torr Heated: 0.002% Full Scale/°C
6.3 cm3 for 0.5 in. OD tube fitting. Volumes with other fitting available on request
Warm-up Time
2 hours nominal (1 hour stabilization timer for unheated)
Overpressure Limit
45 psia (310 kPa)
Materials Exposed to Process Gases
Inconel and Incoloy nickel alloys (Fittings are made from 300 series stainless steel)
Power Requirements
Unheated: +24 VDC ±10% @ 150 mA ±15 VDC @ 180 mA 45°C: +24 VDC ±10% @ 560 mA ±15 VDC @ 480 mA 80°C & 100°C: +24 VDC ±10% @ 800 mA ±15 VDC @ 700 mA
Output Relays
Standard: Two solid state relays for "sensor ready" and "device fault" status. Optional: Two optional internally mounted process pressure trip relays, solid state, independently adjustable through EtherCAT by customer at atmospheric pressure from 0.5% to 100% of Full Scale range. Relay hysteresis default setting of 0.5% of Full Scale and is adjustable through EtherCAT. Relay capacity of 0.375 amps @ 30 VDC. Relay complies with UL1577 requirements.
Indicators
Multicolor status LED and two (2) red/green LEDs for EtherCAT communications status
Compliance
EU27: CE United Kingdom: UKCA US: FCC 15B Canada: CAN ICES-3(B)/NMB-3(B) Australia: AS CISPR11 South Korea: KC Japan: JIS C 61326-1 Taiwan: CNS 13803 EtherCAT: ETG.5003.2080 S (R) V1.30n Vacuum Pressure Gauge When connected to a properly shielded cable, grounded at both ends.
Technical Specs
Type
Vacuum/pressure Transducer
Measurement Type
Absolute
Sensor Temperature
Unheated or Controlled to 45°C, 80°C, or 100°C
Full Scale Pressure Ranges
1, 2, 10, 20, 100, 200, 500, 1000 Torr or mbar
Accuracy
Unheated: 0.25% of Reading 45°C: 0.10% of Reading 80°C & 100°C: 0.25% of Reading Includes non-linearity, hysteresis, and non-repeatability. Accuracy specification and NIST-traceable calibration points included on calibration sheet are from Full Scale to 10% of Full Scale.
Resolution
0.001% Full Scale Theoretical resolution under ideal laboratory conditions. Actual resolution in service is usually determined by system design factors not under MKS’s control.
Response Time
Pressure: 12 ms nominal (10-90% of a step response) influenced by step size and digital pressure filter setting EtherCAT Update Rate: Refresh Rate 1 ms
Fitting Type
0.5 in. OD tube 8 VCR (compatible) female 8 VCR (compatible) male 8 VCR (compatible) female, short tube NW16 ISO-KF 1.33 in. OD CF (rotatable)
Output Signal
Analog: 0-10 VDC into >10 kΩ load Digital: EtherCAT
Electrical Connector
Analog: 15-pin D-subminiature male EtherCAT: Two (2) RJ45 female receptacles for incoming and network signals
Zero Temperature Coefficient
Unheated: 0.015% Full Scale/°C for 1 Torr 0.010% Full Scale/°C for 2 Torr 0.005% Full Scale/°C for 10-1000 Torr Heated: 0.002% Full Scale/°C
6.3 cm3 for 0.5 in. OD tube fitting. Volumes with other fitting available on request
Warm-up Time
2 hours nominal (1 hour stabilization timer for unheated)
Overpressure Limit
45 psia (310 kPa)
Materials Exposed to Process Gases
Inconel and Incoloy nickel alloys (Fittings are made from 300 series stainless steel)
Power Requirements
Unheated: +24 VDC ±10% @ 150 mA ±15 VDC @ 180 mA 45°C: +24 VDC ±10% @ 560 mA ±15 VDC @ 480 mA 80°C & 100°C: +24 VDC ±10% @ 800 mA ±15 VDC @ 700 mA
Output Relays
Standard: Two solid state relays for "sensor ready" and "device fault" status. Optional: Two optional internally mounted process pressure trip relays, solid state, independently adjustable through EtherCAT by customer at atmospheric pressure from 0.5% to 100% of Full Scale range. Relay hysteresis default setting of 0.5% of Full Scale and is adjustable through EtherCAT. Relay capacity of 0.375 amps @ 30 VDC. Relay complies with UL1577 requirements.
Indicators
Multicolor status LED and two (2) red/green LEDs for EtherCAT communications status
Compliance
EU27: CE United Kingdom: UKCA US: FCC 15B Canada: CAN ICES-3(B)/NMB-3(B) Australia: AS CISPR11 South Korea: KC Japan: JIS C 61326-1 Taiwan: CNS 13803 EtherCAT: ETG.5003.2080 S (R) V1.30n Vacuum Pressure Gauge When connected to a properly shielded cable, grounded at both ends.
