DELTA II 2-zone Flow Ratio Controller
Model: delta-ii-flow-ratio-controller
DELTA II 2-zone Flow Ratio Controller
Model: delta-ii-flow-ratio-controller
Technical Specs
Type
Flow Ratio Controller
Full Scale Flow Range
500/500 sccm, 1000/1000 sccm, 2000/2000 sccm, or 10000/10000 sccm
(N2 equivalent)
Ratio Accuracy
±2% set point (for percent set points above 10%)
Channel Flow Control Range
0, 5-100% Full Scale (EtherCAT)
Input Flow Range
5-100% of each channel Full Scale rating (N2 equivalent)
Ratio Control Range
1:1 to 20:1 and 20:1 to 1:1
Ratio Repeatability & Reproducibility
0.02% of channel Full Scale
Resolution
0.02% of channel Full Scale
Maximum Operating Outlet Pressure
EtherCAT: 200 Torr at maximum flow rate through all channels
DeviceNet & Analog: 200 Torr
Maximum Allowable Outlet Pressure Differential
EtherCAT: 50 Torr with the same percentage flow through all channels (highest to lowest pressure channel)
DeviceNet & Analog: 50 torr (between Q1 and Q2)
Normal Operating Pressure Differential
<150 torr (<450 torr for 10000/10000) (N2)
Ratio Settling Time
EtherCAT: <3 seconds (typical dependent on downstream conductance matching)
DeviceNet: <3 seconds
Input Ratio Range
1:1 to 20:1 and 20:1 to 1:1 (EtherCAT)
Ratio Repeatability
±0.3% of set point
Maximum Inlet Pressure
150 psig (non-operational) (EtherCAT)
Zero Temperature Coefficient
EtherCAT: <0.05% Full Scale/°C
DeviceNet & Analog: 0.05% Full Scale/°C
Span Temperature Coefficient
EtherCAT: <0.08% Reading/°C
DeviceNet & Analog: 0.08% Reading/°C
Proof Pressure
1000 psig (DeviceNet)
Burst Pressure
1500 psig (DeviceNet)
Warm-up Time
EtherCAT: 60 Minutes
DeviceNet & Analog: 30 minutes
Operating Temperature
10-40°C
Storage Temperature
-20-65°C
Storage Humidity
0-95% relative humidity, non-condensing
Temperature Accuracy
±2°C
Temperature Resolution
0.1°C
Fitting Type
4 VCR male (non-rotatable)
Display
4 digits for value, 4 characters for unit
External Leak Integrity
<1x10-10 (scc/sec He)
Leak Integrity Through Closed Valve
EtherCAT: < 2% of Channel Full Scale at 400 Torr differential to < 1 Torr
DeviceNet & Analog: <2% of Channel FS at 400 torr differential
Wetted Materials
316 stainless steel VAR, 316 stainless steel, Inconel®, KM-45, PTFE
EtherCAT: Hastelloy®
Surface Finish
5 microinch average Ra
Weight
Less than 5 lbs. (2.3 kg)
Connector
Analog: 9-pin Type "D" Male
DeviceNet: 5-pin DeviceNet microconnector
EtherCAT: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
Power Requirements
Analog: +15-24 VDC ±5%
DeviceNet: 11-25 VDC
EtherCAT: 24 VDC ±10% (10 Watts)
Power Consumption
<9 Watts (DeviceNet)
Communication
Analog, DeviceNet, or EtherCAT
Compliance
CE (an overall metal braided, shielded able, properly grounded at both ends, is required during use).
Technical Specs
Type
Flow Ratio Controller
Full Scale Flow Range
500/500 sccm, 1000/1000 sccm, 2000/2000 sccm, or 10000/10000 sccm
(N2 equivalent)
Ratio Accuracy
±2% set point (for percent set points above 10%)
Channel Flow Control Range
0, 5-100% Full Scale (EtherCAT)
Input Flow Range
5-100% of each channel Full Scale rating (N2 equivalent)
Ratio Control Range
1:1 to 20:1 and 20:1 to 1:1
Ratio Repeatability & Reproducibility
0.02% of channel Full Scale
Resolution
0.02% of channel Full Scale
Maximum Operating Outlet Pressure
EtherCAT: 200 Torr at maximum flow rate through all channels
DeviceNet & Analog: 200 Torr
Maximum Allowable Outlet Pressure Differential
EtherCAT: 50 Torr with the same percentage flow through all channels (highest to lowest pressure channel)
DeviceNet & Analog: 50 torr (between Q1 and Q2)
Normal Operating Pressure Differential
<150 torr (<450 torr for 10000/10000) (N2)
Ratio Settling Time
EtherCAT: <3 seconds (typical dependent on downstream conductance matching)
DeviceNet: <3 seconds
Input Ratio Range
1:1 to 20:1 and 20:1 to 1:1 (EtherCAT)
Ratio Repeatability
±0.3% of set point
Maximum Inlet Pressure
150 psig (non-operational) (EtherCAT)
Zero Temperature Coefficient
EtherCAT: <0.05% Full Scale/°C
DeviceNet & Analog: 0.05% Full Scale/°C
Span Temperature Coefficient
EtherCAT: <0.08% Reading/°C
DeviceNet & Analog: 0.08% Reading/°C
Proof Pressure
1000 psig (DeviceNet)
Burst Pressure
1500 psig (DeviceNet)
Warm-up Time
EtherCAT: 60 Minutes
DeviceNet & Analog: 30 minutes
Operating Temperature
10-40°C
Storage Temperature
-20-65°C
Storage Humidity
0-95% relative humidity, non-condensing
Temperature Accuracy
±2°C
Temperature Resolution
0.1°C
Fitting Type
4 VCR male (non-rotatable)
Display
4 digits for value, 4 characters for unit
External Leak Integrity
<1x10-10 (scc/sec He)
Leak Integrity Through Closed Valve
EtherCAT: < 2% of Channel Full Scale at 400 Torr differential to < 1 Torr
DeviceNet & Analog: <2% of Channel FS at 400 torr differential
Wetted Materials
316 stainless steel VAR, 316 stainless steel, Inconel®, KM-45, PTFE
EtherCAT: Hastelloy®
Surface Finish
5 microinch average Ra
Weight
Less than 5 lbs. (2.3 kg)
Connector
Analog: 9-pin Type "D" Male
DeviceNet: 5-pin DeviceNet microconnector
EtherCAT: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
Power Requirements
Analog: +15-24 VDC ±5%
DeviceNet: 11-25 VDC
EtherCAT: 24 VDC ±10% (10 Watts)
Power Consumption
<9 Watts (DeviceNet)
Communication
Analog, DeviceNet, or EtherCAT
Compliance
CE (an overall metal braided, shielded able, properly grounded at both ends, is required during use).
