DELTA IV 4-zone Flow Ratio Controller
Model: delta-iv-flow-ratio-controller
DELTA IV 4-zone Flow Ratio Controller
Model: delta-iv-flow-ratio-controller
Technical Specs
Type
Flow Ratio Controller
Full Scale Flow Range
500, 1000, 2000, 3000 and 10000 sccm (each channel nitrogen equivalent-Q)
Percentage Accuracy
±2% set point (for flow ≥10% of channel Full Scale)
Channel Flow Control Range
0, 5-100% Full Scale
Input Flow Range
0, 2-100% of total flow within flow channel control range
Percentage Repeatability
±0.3% of set point
Resolution
0.02% of channel Full Scale
Maximum Operating Outlet Pressure
200 Torr at maximum flow rate through all channels
Maximum Allowable Outlet Pressure Differential
50 Torr with the same percentage flow through all channels
Normal Operating Pressure Differential
<150 Torr (@ 4K split 25%); Except <450 Torr for 10K/10K
Percentage Settling Time
<3 seconds (typical dependent on downstream conductance matching)
Maximum Inlet Pressure
150 psig (non-operational)
Zero Temperature Coefficient
<0.05% Full Scale/°C (500 ppm)
Span Temperature Coefficient
<0.08% of Reading/°C (800 ppm)
Warm-up Time
60 minutes
Operating Temperature
10-40°C
Storage Temperature
-20-65°C
Storage Humidity
0-95% relative humidity, non-condensing
Temperature Accuracy
+2°C
Temperature Resolution
0.1°C
Fitting Type
4 VCR male, non-rotatable
External Leak Integrity
<1x10-10 (scc/sec He)
Leak Integrity Through Closed Valve
<2% of channel Full Scale at 500 Torr differential to <10 Torr
Wetted Materials
316 S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality); 316 S.S., Inconel®, KM-45, PTFE
EtherCAT: Hastelloy®
Surface Finish
5 microinch average Ra
Connector
EtherCAT: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
DeviceNet: 5 pin microconnector
Communication
DeviceNet or EtherCAT
Compliance
CE (an overall metal braided, shielded able, properly grounded at both ends, is required during use).
Technical Specs
Type
Flow Ratio Controller
Full Scale Flow Range
500, 1000, 2000, 3000 and 10000 sccm (each channel nitrogen equivalent-Q)
Percentage Accuracy
±2% set point (for flow ≥10% of channel Full Scale)
Channel Flow Control Range
0, 5-100% Full Scale
Input Flow Range
0, 2-100% of total flow within flow channel control range
Percentage Repeatability
±0.3% of set point
Resolution
0.02% of channel Full Scale
Maximum Operating Outlet Pressure
200 Torr at maximum flow rate through all channels
Maximum Allowable Outlet Pressure Differential
50 Torr with the same percentage flow through all channels
Normal Operating Pressure Differential
<150 Torr (@ 4K split 25%); Except <450 Torr for 10K/10K
Percentage Settling Time
<3 seconds (typical dependent on downstream conductance matching)
Maximum Inlet Pressure
150 psig (non-operational)
Zero Temperature Coefficient
<0.05% Full Scale/°C (500 ppm)
Span Temperature Coefficient
<0.08% of Reading/°C (800 ppm)
Warm-up Time
60 minutes
Operating Temperature
10-40°C
Storage Temperature
-20-65°C
Storage Humidity
0-95% relative humidity, non-condensing
Temperature Accuracy
+2°C
Temperature Resolution
0.1°C
Fitting Type
4 VCR male, non-rotatable
External Leak Integrity
<1x10-10 (scc/sec He)
Leak Integrity Through Closed Valve
<2% of channel Full Scale at 500 Torr differential to <10 Torr
Wetted Materials
316 S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality); 316 S.S., Inconel®, KM-45, PTFE
EtherCAT: Hastelloy®
Surface Finish
5 microinch average Ra
Connector
EtherCAT: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
DeviceNet: 5 pin microconnector
Communication
DeviceNet or EtherCAT
Compliance
CE (an overall metal braided, shielded able, properly grounded at both ends, is required during use).
Resources & Downloads
Literature
Drawings & CADs
