elite™ 13.56 MHz RF Plasma Generators
Model: elite-rf-plasma-generators
elite™ 13.56 MHz RF Plasma Generators
Model: elite-rf-plasma-generators
Technical Specs
Type
elite 13.56 MHz RF Plasma Generators
Frequency
13.56 MHz
Accuracy
±0.005%
Load Impedance Range
200 - 750 W, depending on model
Harmonic Output & Distortion
-20 to -30 dBc
Harmonic Output
-30 dBc
Input AC Power
Single phase, 110VAC - 253VAC, 50Hz / 60Hz
RF Connector
Type N
Remote Digital Interface
RS-232 via DB9F
Analog Interface
25-pin DB25F
Cooling
Air-cooled
Operating Temperature
5 - 40°C
Set Point Response Time
<10ms (analog)
Power Switch
Front Panel Switch
AC Input Connector
IEC Compliant Inlet
LED Indicators
PWR and STAT on rear panel
Watts Nominal into 1.1:1
elite 750: 750 W
elite 600: 600 W
elite 300: 300 W
Watts Nominal into 1.5:1
elite 750: 600 W
elite 600: 600 W
elite 300: 300 W
Watts Nominal into 2:1
elite 750: 486 W
elite 600: 486 W
elite 300: 300 W
Watts Nominal into 3:1
elite 750: 384 W
elite 600: 384 W
elite 300: 300 W
Watts Nominal into inf:1
elite 750: 100 W
elite 600: 200 W
elite 300: 200 W
Rack Size
elite 750 & 600: 2U, full rack
Dimensions
elite 750 & 600: 17 in. W x 15 in. D x 3.5 in. H
Weight
9.2 kg
Compliance
CE
Technical Specs
Type
elite 13.56 MHz RF Plasma Generators
Frequency
13.56 MHz
Accuracy
±0.005%
Load Impedance Range
200 - 750 W, depending on model
Harmonic Output & Distortion
-20 to -30 dBc
Harmonic Output
-30 dBc
Input AC Power
Single phase, 110VAC - 253VAC, 50Hz / 60Hz
RF Connector
Type N
Remote Digital Interface
RS-232 via DB9F
Analog Interface
25-pin DB25F
Cooling
Air-cooled
Operating Temperature
5 - 40°C
Set Point Response Time
<10ms (analog)
Power Switch
Front Panel Switch
AC Input Connector
IEC Compliant Inlet
LED Indicators
PWR and STAT on rear panel
Watts Nominal into 1.1:1
elite 750: 750 W
elite 600: 600 W
elite 300: 300 W
Watts Nominal into 1.5:1
elite 750: 600 W
elite 600: 600 W
elite 300: 300 W
Watts Nominal into 2:1
elite 750: 486 W
elite 600: 486 W
elite 300: 300 W
Watts Nominal into 3:1
elite 750: 384 W
elite 600: 384 W
elite 300: 300 W
Watts Nominal into inf:1
elite 750: 100 W
elite 600: 200 W
elite 300: 200 W
Rack Size
elite 750 & 600: 2U, full rack
Dimensions
elite 750 & 600: 17 in. W x 15 in. D x 3.5 in. H
Weight
9.2 kg
Compliance
CE
