GM100A Metal-sealed 50-100 slm Mass Flow Controllers

Model: gm100a-mass-flow-controller

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Full Scale Flow Range
50,000 - 100,000 sccm (N2 equivalent)
Control Range
2% to 100% of Full Scale
Flow Input Output Signal
Voltage: (0 to 5 VDC) 15 pin Type "D" male, 9 pin Type "D" male, Current: (4 to 20 mA) 15 pin Type "D" male
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
50,000 - 100,000 sccm; 40 to 80 psid
Proof Pressure
1000 psig
Burst Pressure
1500 psig
Typical Accuracy
± 1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
Repeatability
±0.3% of Reading
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading/°C
Inlet Pressure Coefficient
<0.02% of Reading/psi

Typical Settling Time
<750 msec., typical above 10% Full Scale
Warm-up Time
30 minutes
Operating Temperature
10° to 50°C
Storage Humidity
0 to 95% Relative Humidity, non-condensing
Storage Temperature
-20° to 80°C
External Leak Integrity
<1 x 10^-10 (scc/sec He)
Leak Integrity Through Closed Valve
<1.0% of Full Scale at 40 psig inlet to atmosphere
Wetted Materials
316L Stainless Steel VAR, 316 Stainless Steel, Elgiloy®, Nickel
Surface Finish
10µ inch average Ra
Weight
3 lbs (1.4 kg)
Compliance
CE

Full Scale Flow Range
50,000 - 100,000 sccm (N2 equivalent)
Control Range
2% to 100% of Full Scale
Flow Input Output Signal
Voltage: (0 to 5 VDC) 15 pin Type "D" male, 9 pin Type "D" male, Current: (4 to 20 mA) 15 pin Type "D" male
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
50,000 - 100,000 sccm; 40 to 80 psid
Proof Pressure
1000 psig
Burst Pressure
1500 psig
Typical Accuracy
± 1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
Repeatability
±0.3% of Reading
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading/°C
Inlet Pressure Coefficient
<0.02% of Reading/psi

Typical Settling Time
<750 msec., typical above 10% Full Scale
Warm-up Time
30 minutes
Operating Temperature
10° to 50°C
Storage Humidity
0 to 95% Relative Humidity, non-condensing
Storage Temperature
-20° to 80°C
External Leak Integrity
<1 x 10^-10 (scc/sec He)
Leak Integrity Through Closed Valve
<1.0% of Full Scale at 40 psig inlet to atmosphere
Wetted Materials
316L Stainless Steel VAR, 316 Stainless Steel, Elgiloy®, Nickel
Surface Finish
10µ inch average Ra
Weight
3 lbs (1.4 kg)
Compliance
CE

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