GM100A Metal-sealed 50-100 slm Mass Flow Meters
Model: gm100a-mass-flow-meter
GM100A Metal-sealed 50-100 slm Mass Flow Meters
Model: gm100a-mass-flow-meter
Technical Specs
Type
Mass Flow Meter (MFM)
Full Scale Flow Range
50-100 SLM (N2 equivalent)
Measurement Ranges
0.1-100% of Full Scale (range on mech.)
Fitting Type
Compatible with:
Swagelok® 4 VCR® male (High Flow)
Swagelok 8 VCR male
0.375 in. Swagelok compression seal,
0.5 in. Swagelok compression seal
10 mm Swagelok compression seal
12 mm Swagelok compression seal
KF16
Swagelok 8 VCO male (consult factory)
Flow Input Output Signal
Voltage (0-5 VDC)
Current (4-20 mA)
Analog Connector
15 pin Type D male, 9 pin Type D male
15 pin Type D male
Maximum Inlet Pressure
500 psi
Proof Pressure
1000 psig
Burst Pressure
1500 psig
Typical Accuracy
±1% of Reading
Repeatability
±0.3% of Reading
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading/°C
Inlet Pressure Coefficient
<0.02% of Reading/psi
Warm-up Time
30 minutes (to within 0.2% of Full Scale of steady state performance)
Operating Temperature
10-50°C
Storage Humidity
0 to 95% relative humidity, non-condensing
Storage Temperature
-20° to 80°C (-4° to 176° F)
External Leak Integrity
<1 x 10-10
Wetted Materials
316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality)
Surface Finish
10μ inch average Ra
Power Requirements
+15 to +24 VDC @ (<2 watts)
Weight
<2.5 lbs (1.1 kg)
Compliance
CE
Technical Specs
Type
Mass Flow Meter (MFM)
Full Scale Flow Range
50-100 SLM (N2 equivalent)
Measurement Ranges
0.1-100% of Full Scale (range on mech.)
Fitting Type
Compatible with:
Swagelok® 4 VCR® male (High Flow)
Swagelok 8 VCR male
0.375 in. Swagelok compression seal,
0.5 in. Swagelok compression seal
10 mm Swagelok compression seal
12 mm Swagelok compression seal
KF16
Swagelok 8 VCO male (consult factory)
Flow Input Output Signal
Voltage (0-5 VDC)
Current (4-20 mA)
Analog Connector
15 pin Type D male, 9 pin Type D male
15 pin Type D male
Maximum Inlet Pressure
500 psi
Proof Pressure
1000 psig
Burst Pressure
1500 psig
Typical Accuracy
±1% of Reading
Repeatability
±0.3% of Reading
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading/°C
Inlet Pressure Coefficient
<0.02% of Reading/psi
Warm-up Time
30 minutes (to within 0.2% of Full Scale of steady state performance)
Operating Temperature
10-50°C
Storage Humidity
0 to 95% relative humidity, non-condensing
Storage Temperature
-20° to 80°C (-4° to 176° F)
External Leak Integrity
<1 x 10-10
Wetted Materials
316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality)
Surface Finish
10μ inch average Ra
Power Requirements
+15 to +24 VDC @ (<2 watts)
Weight
<2.5 lbs (1.1 kg)
Compliance
CE
Resources & Downloads
Literature
Application Notes
