GM50A/GM51A Metal-sealed 5-50,000 sccm Mass Flow Controllers

Model: gm50a-mass-flow-controller

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Type
Mass Flow Controller (MFC)
Full Scale Flow Range
5 - 50000 sccm (N2 equivalent)
Control Range
2-100% of Full Scale
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
10 to 5000 sccm; 10 to 40 psid, 10000 to 20000 sccm; 15 to 40 psid, 30000 to 50000 sccm; 25 to 40 psid
Proof Pressure
1000 psig
Burst Pressure
1500 psig
Typical Accuracy
±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale
Repeatability
± 0.3% of Reading
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading/°C
Inlet Pressure Coefficient
<0.02% of Reading/psi

Typical Settling Time
<750 msec, typical above 5% Full Scale
Warm-up Time
30 minutes
Operating Temperature
10°C to 50°C
Storage Humidity
0 to 95% Relative Humidity, non-condensing
Storage Temperature
-20° to 80°C
External Leak Integrity
<1 x 10^-10 (scc/sec He)
Leak Integrity Through Closed Valve
<1.0% of Full Scale at 40 psig inlet to atmosphere
Wetted Materials
316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45
Weight
3 lbs (1.4 kg)
Compliance
CE

Type
Mass Flow Controller (MFC)
Full Scale Flow Range
5 - 50000 sccm (N2 equivalent)
Control Range
2-100% of Full Scale
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
10 to 5000 sccm; 10 to 40 psid, 10000 to 20000 sccm; 15 to 40 psid, 30000 to 50000 sccm; 25 to 40 psid
Proof Pressure
1000 psig
Burst Pressure
1500 psig
Typical Accuracy
±1% of set point for 20 to 100% Full Scale, ± 0.2% of Full Scale for 2 to 20% Full Scale
Repeatability
± 0.3% of Reading
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading/°C
Inlet Pressure Coefficient
<0.02% of Reading/psi

Typical Settling Time
<750 msec, typical above 5% Full Scale
Warm-up Time
30 minutes
Operating Temperature
10°C to 50°C
Storage Humidity
0 to 95% Relative Humidity, non-condensing
Storage Temperature
-20° to 80°C
External Leak Integrity
<1 x 10^-10 (scc/sec He)
Leak Integrity Through Closed Valve
<1.0% of Full Scale at 40 psig inlet to atmosphere
Wetted Materials
316L S.S. VAR, 316 S.S., Elgiloy®, Nickel, KM45
Weight
3 lbs (1.4 kg)
Compliance
CE

G and I Series Mass Flow Controller/Meter Manual(2.2 MB, PDF)
G-Series Mass Flow Controller/Meter DeviceNet™ Supplement(112.5 kB, PDF)
G-Series Mass Flow Controller/Meter RS485 Supplement(149.3 kB, PDF)
G-Series Mass Flow Controller/Meter PROFINET Communications Supplement(1 MB, PDF)
G and I-Series Mass Flow Controller/Meter Profibus Manual Supplement(86.9 kB, PDF)
G-Series/I-Series MFC Modbus Register Map and Specification(502.9 kB, PDF)
G-Series MFC Web Browser Tutorial(5.6 MB, PDF)
G-Series Mass Flow Controller & Meter EtherCAT Manual Supplement(1.1 MB, PDF)

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