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  5. GM50A/GM51A Metal-sealed 5-50,000 sccm Mass Flow Meters

GM50A/GM51A Metal-sealed 5-50,000 sccm Mass Flow Meters

Model: gm50a-mass-flow-meter

GM50A/GM51A Metal-sealed 5-50,000 sccm Mass Flow Meters

Model: gm50a-mass-flow-meter

GM50A/GM51A Metal-sealed 5-50,000 sccm Mass Flow Meters

Technical Specs

  • Type
    Mass Flow Meter (MFM)
  • Full Scale Flow Range
    5-50000 sccm (N2 equivalent)
  • Measurement Ranges
    0.1% to 100% of Full Scale (range on mech.)
  • Fitting Type
    Swagelok® 4 VCR® male, 0.25 in.
    Swagelok compression seal, surface mount,
    Swagelok 8 VCR male
    0.125 in. Swagelok
    0.5 in. Swagelok
    6 mm Swagelok
    8 mm Swagelok
    KF16
    0.375 in. Swagelok
    12mm Swagelok
    2 VCR male
  • Flow Input Output Signal
    Voltage (0 to 5 VDC)
    Current (4 to 20 mA)
  • Analog Connector
    15 pin Type D male
    9 pin Type D male
    15 pin Type D male
  • Maximum Inlet Pressure
    500 psi
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Typical Accuracy
    ±1% of Reading
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.02% of Reading/psi
  • Warm-up Time
    30 minutes
    (to within 0.2% of Full Scale of steady state performance)
  • Operating Temperature
    10-50°C
  • Storage Humidity
    0 to 95% relative humidity, non-condensing
  • External Leak Integrity
    <1 x 10-10 (scc/sec He)
  • Wetted Materials
    316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality)
  • Surface Finish
    16μ inch average Ra
  • Power Requirements
    +15 to +24 VDC @ (<2 watts)
  • Weight
    <2.5 lbs (1.1 kg)
  • Compliance
    CE

Technical Specs

  • Type
    Mass Flow Meter (MFM)
  • Full Scale Flow Range
    5-50000 sccm (N2 equivalent)
  • Measurement Ranges
    0.1% to 100% of Full Scale (range on mech.)
  • Fitting Type
    Swagelok® 4 VCR® male, 0.25 in.
    Swagelok compression seal, surface mount,
    Swagelok 8 VCR male
    0.125 in. Swagelok
    0.5 in. Swagelok
    6 mm Swagelok
    8 mm Swagelok
    KF16
    0.375 in. Swagelok
    12mm Swagelok
    2 VCR male
  • Flow Input Output Signal
    Voltage (0 to 5 VDC)
    Current (4 to 20 mA)
  • Analog Connector
    15 pin Type D male
    9 pin Type D male
    15 pin Type D male
  • Maximum Inlet Pressure
    500 psi
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Typical Accuracy
    ±1% of Reading
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.02% of Reading/psi
  • Warm-up Time
    30 minutes
    (to within 0.2% of Full Scale of steady state performance)
  • Operating Temperature
    10-50°C
  • Storage Humidity
    0 to 95% relative humidity, non-condensing
  • External Leak Integrity
    <1 x 10-10 (scc/sec He)
  • Wetted Materials
    316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality)
  • Surface Finish
    16μ inch average Ra
  • Power Requirements
    +15 to +24 VDC @ (<2 watts)
  • Weight
    <2.5 lbs (1.1 kg)
  • Compliance
    CE

Resources & Downloads

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