GPCMA Absolute Pressure Controller with Mass Flow Meter

500 Torr, 1000 Torr, 2000 Torr, 100 psia Full Scale

Swagelok® 4 VCR Male
1-1/8 inch surface mount (C-seal, W-seal)
1/4 inch Swagelok compression seal

Normally Closed

PTFE (Teflon®)

5, 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000, 30000, 50000 (N2 equivalent)

Torr, kPa, psi, mbar

0.1 Torr

±1.0% of Reading >20% Full Scale
±0.2% of Full Scale <20% of Full Scale Flow (including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)

2x Full Scale for all ranges

45 psid

1500 psig

Downstream

±0.5% of Reading

±0.02% of Full Scale/°C

±0.04% of Reading/°C

>2 to 100% of Full Scale

<1.0 second

10-50°C (50-to 122°F)

-20-80°C (-4-176°F)

0 to 95% Relative Humidity, non-condensing

<1 x 10^-10 (scc/sec He)

<1.0% of orifice Full Scale (Nitrogen at 25 psig on inlet to atmosphere)

2% to 100% of Full Scale

±0.3% of Reading

0.1% of Full Scale

±1.0% of Reading >20% of Full Scale
±0.2% of Full Scale (>20% of Full Scale flow)
(including non-linearity, hysteresis, and non-repeatability referenced to 760 mmHg and 0°C)

<0.08% of Reading/°C

<0.05% of Full Scale/°C

Standard: 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., Elgiloy®, KM-45
Optional: PTFE (Teflon) Valve Seat

<10 µinches, average Ra electropolished

DeviceNet™: +11 to +25 VDC per (<4 watts)
EtherCAT®: +24 VDC (<5 watts)
RS485: +15 to +24 VDC(<4 watts)

DeviceNet™: 5 pin micro connector (power and comm.)
EtherCAT®: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
RS485: 9 pin Type D male (power and comm.)

DeviceNet™: 4 positions: 125, 250, 500K (Default), (programmable over network)
EtherCAT®: No switch
RS485: No switch (set data rate via RS485)

100 Mbps

125 Kbps, 250 Kbps, 500 Kbps

9.6 Kbps,19.2 Kbps,38.4 Kbps

DeviceNet™: 2 switches, 10 positions: 0,0 to 6,3, 1 to 254
EtherCAT®: 3 switches, 16 positions
RS485: Set address over RS485, Station Addresses 0,0 to 9,9

DeviceNet™: Up to 64 nodes
EtherCAT®: Up to 4095 nodes
RS485: Up to 32 nodes

DeviceNet™: LED Network (green/red), LED Module (green/red)
EtherCAT®: LED Power (green), LED Run (green), LED Error (red), LED Comm (green)
RS485: LED Comm (yellow),LED Error (red)

<3 lbs (1.36 kg)

CE